Nils Brenning

High power impulse magnetron sputtering discharge

The high power impulse magnetron sputtering (HiPIMS) discharge is a recent addition to plasma based sputtering technology. In HiPIMS, high power is applied to the magnetron target in unipolar pulse ...

Cross-field ion transport during high power impulse magnetron sputtering

In this study, the effect on thin film growth due to an anomalous electron transport, found in high power impulse magnetron sputtering (HiPIMS), has been investigated for the case of a planar circular magnetron. An important consequence of this type of transport is that it affects the way ions are being transported in the plasma. It was found that a significant fraction of ions are transported radially outwards in the vicinity of the cathode, across the magnetic field lines, leading to increased deposition rates directly at the side of the cathode (perpendicular to the target surface). Furthermore, this mass transport parallel to the target surface leads to that the fraction of sputtered material reaching a substrate placed directly in front of the target is substantially lower in HiPIMS compared with conventional direct current magnetron sputtering (dcMS). This would help to explain the lower deposition rates generally observed for HiPIMS compared with dcMS. Moreover, time-averaged mass spectrometry measurements of the energy distribution of the cross-field transported ions were carried out. The measured distributions show a direction-dependent high-energy tail, in agreement with predictions of the anomalous transport mechanism.

Review of the CIV phenomenon

Alfvéns Critical Ionization Velocity (CIV) phenomenon is reviewed, with the main emphasis on comparisons between experimental and theoretical results. The review covers (1) the velocity measurements in laboratory experiments, (2) the effect of wall interaction, (3) the experimental and theoretical limits to the magnetic field strength and the neutral density, (4) ionospheric release experiments, (5) theoretical models for electron energization in comparison to experimental results, and (6) CIV models. All laboratory investigations of the CIV are found to obey the three following simple rules of thumb: (1) if the magnetic field is so strong that VA > 3V0, and if there is enough neutral gas that the Townsend condition is fulfilled, then the CIV effect occurs, (2) when it occurs, the threshold velocity (or E/B value) is within ± 50% of Alfvéns proposed value Vc, and (3) for weaker magnetic fields, the effect gradually becomes irreproducible or weak and disappears altogether for VA < V0. The theoretical understanding of the process has grown rapidly during the last decade, mainly due to the introduction of computer simulation models which have to a large degree confirmed and extended earlier analytical theories. The CIV mechanism is not due to one single plasma process, but to several different mechanisms which are applicable in different parameter regimes and geometries. The computer simulations have shown that in order to understand the mechanism properly it is necessary to consider a large number of interlocking collisional and plasma processes. The theoretical development has reached the stage where it should be possible to adapt computer simulation models to specific experiments and predict ionization rates, plasma flow velocities, E/B values, particle distributions, and wave spectra. Such models should for the first time provide a really firm basis for extrapolations of the CIV process to space applications.

Transition between the discharge regimes of high power impulse magnetron sputtering and conventional direct current magnetron sputtering

Current and voltage have been measured in a pulsed high power impulse magnetron sputtering (HiPIMS) system for discharge pulses longer than 100 mu s. Two different current regimes could clearly be ...

Gas rarefaction and the time evolution of long high-power impulse magnetron sputtering pulses

Model studies of 400 mu s long discharge pulses in high-power impulse magnetron sputtering have been made to study the gas dynamics and plasma chemistry in this type of pulsed processing plasma. Da ...

Conditions for plasmoid penetration across abrupt magnetic barriers

The penetration of plasma clouds, or plasmoids, across abrupt magnetic barriers (of the scale less than a few ion gyro radii, using the plasmoid directed velocity) is studied. The insight gained earlier, from detailed experimental and computer simulation investigations of a case study, is generalized into other parameter regimes. It is concluded for what parameters a plasmoid should be expected to penetrate the magnetic barrier through self-polarization, penetrate through magnetic expulsion, or be rejected from the barrier. The scaling parameters are ne, v0, B⊥, mi, Ti, and the width w of the plasmoid. The scaling is based on a model for strongly driven, nonlinear magnetic field diffusion into a plasma which is a generalization of the earlier laboratory findings. The results are applied to experiments earlier reported in the literature, and also to the proposed application of impulsive penetration of plasmoids from the solar wind into the Earth’s magnetosphere.

An ionization region model for high-power impulse magnetron sputtering discharges

A time-dependent plasma discharge model has been developed for the ionization region in a high-power impulse magnetron sputtering (HiPIMS) discharge. It provides a flexible modeling tool to explore ...

Argon metastables in HiPIMS: time-resolved tunable diode-laser diagnostics

Time-resolved tunable diode-laser absorption spectroscopy measurements were performed on the argon metastable (Ar-m) level 3s(2)3p(5)(P-2(3/2)degrees)4s excited at 801.478 nm, in the dense plasma r ...

Anomalous electron transport in high power impulse magnetron sputtering

Oscillating electric fields in the megahertz range have been studied in a high power impulse magnetron sputtering (HIPIMS) plasma with the use of electric field probe arrays. One possible reason fo ...

Localized density enhancements in the magnetosheath: Three‐dimensional morphology and possible importance for impulsive penetration

We use Cluster multipoint density measurements, using the spacecraft potential, to identify localized density enhancements (>50%) in the magnetosheath, and estimate their three-dimensional morph ...