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Publication


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Archive | 1995

SURFACE MEASURING INSTRUMENT

Nishimatsu Shigeru; Mizutani Tatsumi; Tsujii Kanji; Haruta Akira; Munakata Tadasuke; Hosoki Shigeyuki


Archive | 1987

PROCESSING EQUIPMENT EMPLOYING MICROWAVE PLASMA

Okudaira Sadayuki; Suzuki Keizo; Nishimatsu Shigeru; Ninomiya Takeshi; Tsujimoto Kazunori


Archive | 1989

METHOD AND DEVICE FOR MEASURING SEMICONDUCTOR SURFACE

Nishimatsu Shigeru; Mizutani Tatsumi; Tsujii Kanji; Haruta Akira; Munakata Tadasuke; Hosoki Shigeyuki


Archive | 1989

METHOD AND APPARATUS FOR MONITORING PROCESS

Tsujii Kanji; Okudaira Hidekazu; Nishimatsu Shigeru; Hirobe Yoshimichi; Nojiri Kazuo


Archive | 1988

NEUTRAL BEAM FORMING METHOD

Mizutani Tatsumi; Suzuki Keizo; Nishimatsu Shigeru


Archive | 1984

METHOD AND DEVICE FOR MEASURING DIMENSION OF FINE GROOVE

Okudaira Sadayuki; Nishimatsu Shigeru; Ishitani Susumu; Tamura Hifumi; Mukai Kiichirou


Archive | 1983

PLASMA ETCHING METHOD FOR MULTILAYER FILM

Nishimatsu Shigeru; Suzuki Keizou; Ninomiya Takeshi; Mizutani Tatsumi; Yamamoto Naoki; Okudaira Sadayuki


Archive | 1982

Microwave plasma discharge tube

Kubota Shigeo; Suzuki Keizou; Kondou Yoshimasa; Miyata Toshimitsu; Takahashi Toshio; Ninomiya Takeshi; Nishimatsu Shigeru


Archive | 1989

METHOD AND EQUIPMENT FOR SURFACE TREATMENT

Mizutani Tatsumi; Suzuki Keizo; Nishimatsu Shigeru


Archive | 1988

TREATMENT OF EXTRA-FINE SURFACE

Tsujii Kanji; Hosoki Shigeyuki; Nishimatsu Shigeru; Suzuki Keizo; Yajima Yusuke

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