Nobuyoshi Ogasawara
Mitsubishi
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Publication
Featured researches published by Nobuyoshi Ogasawara.
Japanese Journal of Applied Physics | 1991
Norio Hayafuji; Hirotaka Kizuki; Motoharu Miyashita; Kaoru Kadoiwa; Takashi Nishimura; Nobuyoshi Ogasawara; Hisao Kumabe; T. Murotani; Akiharu Tada
This paper describes the study of crack propagation and mechanical fracture in GaAs-on-Si, which are closely related with the residual stress. The crack propagation is often observed as the GaAs thickness exceeds about 3 µm, and the upper limit of the number of cracks increases linearly as the GaAs thickness increases. The cracks propagate from the surface defects, where stress ten times larger than the original residual thermal stress in GaAs-on-Si exists. The mechanical fracture strength (ζ) of the GaAs-on-Si wafer decreases as the GaAs thickness increases, and becomes equal to that of the bulk GaAs at the thickness of about 3 µm due to the concentrated stress near the cracks. The back coating of SiO2 is effective for stress relaxation, and the preliminary result of about 3×108 dyn/cm2 of stress relaxation is obtained.
Archive | 1994
Motoharu Miyashita; Nobuyoshi Ogasawara; Tadashi Kimura
Archive | 1988
Nobuyoshi Ogasawara; Kotaro Mitsui
Archive | 1991
Takahiko Oohara; Yoshiro Ohmachi; Yoshiaki Kadota; Kotaro Mitsui; Nobuyoshi Ogasawara; Takashi Nishimura
Archive | 1991
Takahiko Oohara; Masaaki Usui; Nobuyoshi Ogasawara; Kotaro Mitsui
Archive | 1988
Nobuyoshi Ogasawara; Kotaro Mitsui
Archive | 1993
Tadashi Kimura; Muneharu Miyashita; Nobuyoshi Ogasawara; 宗治 宮下; 伸好 小笠原; 忠司 木村
Archive | 1991
Takahiko Oohara; Yoshiro Ohmachi; Yoshiaki Kadota; Kotaro Mitsui; Nobuyoshi Ogasawara; Takashi Nishimura
Archive | 1991
Takahiko Oohara; Yoshiro Ohmachi; Yoshiaki Kadota; Kotaro Mitsui; Nobuyoshi Ogasawara; Takashi Nishimura
Archive | 1991
Takahiko Oohara; Yoshiro Ohmachi; Yoshiaki Kadota; Kotaro Mitsui; Nobuyoshi Ogasawara; Takashi Nishimura