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Noriko Miura
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The Japan Society of Applied Physics | 2018

Characterization of the minimal CVD tool in the hydrodynamic point of view

Yuuki Ishida; Takanori Mikahara; Noriko Miura; Shinichi Ikeda; Takahiro Ito; Hitoshi Habuka; Sommawan Khumpuang; Shiro Hara

The Japan Society of Applied Physics | 2018

Thin Gate Oxidation Process Using a Minimal Focused Light Heating Furnace

Noriko Miura; Norio Umeyama; Takeshi Yamada; Takeshi Aizawa; Shinihi Ikeda; Yuuki Ishida; Takanori Mikahara; Yasuhiro Onishi; Sommawan Khumpuang; Shiro Hara

The Japan Society of Applied Physics | 2018

Cleanroom-Free Environment-Control System PLAD for Minimal fab (II)

Takashi Yajima; Masaharu Yasui; Noriko Miura; Sommawan Khumpuang; Hitoshi Maekawa; Shiro Hara

The Japan Society of Applied Physics | 2018

Performance evaluation of minimal optical interference type film thickness tester

Norio Umeyama; Noriko Miura; kazushige sato; Miyako Hada; Hiroshi Nishizato; Takumi Moriyama; Sommawan Khumpuang; Shiro Hara

The Japan Society of Applied Physics | 2017

Fabrication of pMOSFET using Minimal Water Plasma Ashing Process

Noriko Miura; Takeshi Aizawa; Fumito Imura; Takeshi Yamada; Mitsunori Nogawa; Yasuhiro Onishi; Tatsuo Ishijima; Hiroaki Suzuki; Taishin Shimada; Sommawan Khumpuang; Shiro Hara

The Japan Society of Applied Physics | 2017

Development of Water Plasma Ashing Technology for Minimal Fabrication System

Takeshi Aizawa; Takeshi Yamada; Mitsunori Nogawa; Yasuhiro Onishi; Noriko Miura; Tatsuo Ishijima; Takuya Kitano; Hiroaki Suzuki; Arufa Shiota; Sommawan Khumpuang; Shiro Hara

The Japan Society of Applied Physics | 2017

Factor of the thickness distribution on the Minimal Si-CVD equipment

Shinichi Ikeda; Yuuki Ishida; Takanori Mikahara; Noriko Miura; Takahiro Ito; Hitoshi Habuka; Sommawan Khumpuang; Shiro Hara

The Japan Society of Applied Physics | 2016

Effect of thermal convection on Minimal Si-CVD equipment

Takanori Mikahara; Noriko Miura; Yuuki Ishida; Takahiro Ito; Shinichi Ikeda; Hitoshi Habuka; Sommawan Khumpuang; Shiro Hara

The Japan Society of Applied Physics | 2016

Process of Thin Thermal Oxide Film Using a Minimal Focused Light Heating Furnace with a Sealed Chamber

Noriko Miura; Takeshi Yamada; Takeshi Aizawa; Shinichi Ikeda; Yuuki Ishida; Takanori Mikahara; Hiroshi Nishizato; Norio Umeyama; Yasuhiro Onishi; Sommawan Khumpuang; Shiro Hara

The Japan Society of Applied Physics | 2016

Effect of thermal convection on the Minimal Si-CVD equipment (II)

Yuuki Ishida; Takanori Mikahara; Noriko Miura; Takahiro Ito; Shinichi Ikeda; Hitoshi Habuka; Sommawan Khumpuang; Shiro Hara

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