Noritaka Mochizuki
Canon Inc.
Network
Latest external collaboration on country level. Dive into details by clicking on the dots.
Publication
Featured researches published by Noritaka Mochizuki.
Japanese Journal of Applied Physics | 1991
Yutaka Watanabe; Masayuki Suzuki; Noritaka Mochizuki; Masahito Niibe; Yasuaki Fukuda
We investigated the effect of soft X-ray multilayer mirrors on the characteristics of image formation and determined that the phase shift of the X-ray on the mirror plays an important role in image formation as well as reflectivity. Under such a condition that the effect on the characteristics of image formation can be neglected, we designed an optical system that has a resolution of 0.18 µm and 0.25 µm at the wavelength of 5 nm and 13 nm, respectively, and distortion of less than 0.01 µm in a whole exposure field of 20×40 mm2. The necessary surface accuracy of mirrors and tolerance of setting mirrors are discussed.
Archive | 1988
Yukuo Nishimura; Haruki Kawada; Masahiro Haruta; Yutaka Hirai; Noritaka Mochizuki; Takashi Nakagiri
Archive | 1987
Masayuki Suzuki; Noritaka Mochizuki; Setsuo Minami; Shigetaro Ogura; Yasuaki Fukuda; Yutaka Watanabe; Yasuo Kawai; Takao Kariya
Archive | 1992
Hideaki Mitsutake; Noritaka Mochizuki; Shigeru Kawasaki; Kazumi Kimura; Junko Shingaki
Archive | 1978
Kazuhiro Hirayama; Yasushi Sato; Noritaka Mochizuki; Katsumi Masaki
Archive | 1996
Noritaka Mochizuki
Archive | 1972
Takehiko Kiyohara; Noritaka Mochizuki
Archive | 1972
Kazuya Hosoe; Seiichi Matsumoto; Noritaka Mochizuki
Archive | 1983
Katsumi Nakagawa; Noritaka Mochizuki; Toshiyuki Komatsu; Masaki Fukaya; Mitsutoshi Kuno
Archive | 1980
Noritaka Mochizuki; Atsushi Kubota
