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Oka Kenji

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Publication

Featured researches published by Oka Kenji.

Archive | 2003

METHOD AND DEVICE FOR INSPECTING DEFECT OF PATTERN

Maeda Shunji; Nakayama Yasuhiko; Yoshida Minoru; Oka Kenji; Kubota Hitoshi

Archive | 2001

METHOD AND DEVICE FOR PROCESSING INSPECTION DATA

Maeda Shunji; Yoshitake Yasuhiro; Oka Kenji; Shimoda Atsushi; Shiba Masataka

Archive | 2000

INSPECTION DATA PROCESSING METHOD, AND INSPECTION DATA PROCESSOR

Maeda Shunji; Yoshitake Yasuhiro; Oka Kenji

Archive | 1999

APPARATUS AND METHOD FOR INSPECTING PATTERN ON CHIP

Nakayama Yasuhiko; Maeda Shunji; Oka Kenji; Makihira Hiroshi; Yoshida Minoru; Shibata Yukihiro

Archive | 2000

DEFECT INSPECTION METHOD FOR PATTERN AND ITS DEVICE

Maeda Shunji; Yoshida Atsushi; Oka Kenji; Yoshida Minoru; Shibata Yukihiro; Yamaguchi Kazuo

Archive | 1999

OPTICAL DEFECT-INSPECTION DEVICE

Yoshida Atsushi; Maeda Shunji; Yamaguchi Kazuo; Yoshida Minoru; Shibata Yukihiro; Oka Kenji

Archive | 2000

YIELD PREDICTING METHOD AND APPARATUS THEREOF, AND MANUFACTURE OF SUBSTRATE

Matsumoto Shunichi; Noguchi Minoru; Maeda Shunji; Oka Kenji; Watanabe Kenji

Archive | 1997

METHOD AND APPARATUS FOR EVALUATION OF INSPECTION PERFORMANCE OF PATTERN INSPECTION DEVICE

Nakayama Yasuhiko; Maeda Shunji; Yoshida Minoru; Kubota Hitoshi; Oka Kenji; Makihira Hiroshi

Archive | 1996

STAGE INSPECTION DEVICE AND ITS METHOD

Yoshida Minoru; Oka Kenji; Maeda Shunji; Kubota Hitoshi; Nakayama Yasuhiko

Archive | 1996

PATTERN INSPECTION DEVICE AND ITS METHOD

Nakayama Yasuhiko; Maeda Shunji; Yoshida Minoru; Kubota Hitoshi; Oka Kenji

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Collaboration

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Maeda Shunji

Hitachi

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Kubota Hitoshi

Hitachi

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Shiba Masataka

Hitachi

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