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Okada Mitsuhiro

Tokyo Electron

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Publication

Featured researches published by Okada Mitsuhiro.

Archive | 1995

APPARATUS AND METHOD FOR HEAT TREATMENT

Fujita Takehiko; Okada Mitsuhiro; Umezawa Koutai; Hasebe Kazuhide; Sakamoto Koichi

Archive | 2007

DEPOSITION METHOD AND APPARATUS THEREFOR

Hasebe Kazuhide; Okada Mitsuhiro; Kin Saiko; Ogawa Atsushi

Archive | 2005

HEAT TREATMENT METHOD AND HEAT TREATMENT EQUIPMENT

Fujita Takehiko; Tamura Akitake; Suzuki Keisuke; Hasebe Kazuhide; Okada Mitsuhiro

Archive | 2004

TREATING SYSTEM AND OPERATING METHOD FOR TREATING SYSTEM

Hasebe Kazuhide; Endo Atsushi; Okada Mitsuhiro; Ogawa Jun; Yamamoto Akihito; Nakao Takashi; Kamimura Masaki; Ushiku Yukihiro

Archive | 2003

MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS AND MANUFACTURING METHOD THEREFOR

Saito Yukimasa; Sakurai Hiroshi; Hasebe Kazuhide; Okada Mitsuhiro; Endo Atsushi; Onodera Tokuyuki; Ogawa Atsushi; Tani Kazumi; Miyajima Nariyoshi; Teratani Takema; Hamaguchi Tatsuya

Archive | 2006

FILM FORMATION METHOD, APPARATUS AND RECORDING MEDIUM FOR SEMICONDUCTOR PROCESS

Hasebe Kazuhide; Okada Mitsuhiro; Chou Pao Hwa; Kim Chae Ho; Ogawa Jun

Archive | 2006

THIN FILM FORMATION DEVICE, WASHING METHOD THEREOF AND PROGRAM

Okada Mitsuhiro; Endo Atsushi; Nishimura Toshiharu; Hasebe Kazuhide

Archive | 2014

METHOD OF FILLING TRENCH AND PROCESSING UNIT

Suzuki Daisuke; Takahashi Kazuya; Okada Mitsuhiro; Komori Katsuhiko; Onodera Satoshi

Archive | 2013

METHOD OF FORMING A LAMINATED SEMICONDUCTOR FILM

Okada Mitsuhiro

Archive | 2010

METHOD FOR CLEANING THIN-FILM FORMING DEVICE, THIN-FILM FORMING METHOD, THIN-FILM FORMING DEVICE, AND PROGRAM

Okada Mitsuhiro; Nishimura Toshiharu

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Hasebe Kazuhide

Tokyo Electron

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Takahashi Kazuya

Tokyo Electron

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Takagi Satoshi

Tokyo Electron

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Komori Katsuhiko

Tokyo Electron

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Fujita Takehiko

Tokyo Electron

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Suzuki Keisuke

Tokyo Electron

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Tamura Akitake

Tokyo Electron

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Yamamoto Akihito

Toshiba

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Yonekura Hiromasa

Tokyo Electron

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