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Dive into the research topics where Okano Haruo is active.

Publication


Featured researches published by Okano Haruo.


Archive | 1990

Surface processing apparatus and method.

Nishino Hirotaka; Hayasaka Nobuo; Okano Haruo


Archive | 1984

Forming method for thin film

Horioka Keiji; Okano Haruo; Sekine Makoto; Arikado Tsunetoshi


Archive | 1981

Ion etching method

Okano Haruo; Horiike Yasuhiro


Archive | 1980

PLASMA ETCHING APPARATUS AND ETCHING METHOD

Okano Haruo; Yamazaki Takashi; Horiike Yasuhiro


Archive | 1993

SURFACE TREATMENT METHOD

Nishino Hirotake; Hayasaka Nobuo; Okano Haruo


Archive | 1992

METAL THIN FILM FORMATION METHOD

Arikado Tsunetoshi; Okano Haruo


Archive | 1986

Taper etching method

Arikado Tsunetoshi; Okano Haruo; Horioka Keiji


Archive | 1994

METHOD AND APPARATUS FOR CHARGED BEAM IRRADIATION

Sakai Itsuko; Sekine Makoto; Hayasaka Nobuo; Okano Haruo


Archive | 1988

Thin-film forming device and formation of thin film by using this device

Sekine Makoto; Okano Haruo; Shima Shohei


Archive | 1982

Cleaning of semiconductor substrate

Okumura Katsuya; Fukino Fumio; Watanabe Tooru; Suzuki Yasuharu; Okano Haruo

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