Olav Solgaard

Deformable grating optical modulator.

A new type of light modulator, the deformable grating modulator, based on electrically controlling the amplitude of a micromachined phase grating is described. Mechanical motion of one quarter of a wavelength is sufficient for switching in this device. The small mechanical motion allows the use of structures with high mechanical resonance frequencies. We have developed a deformable grating modulator with a bandwidth of 1.8 MHz and a switching voltage of 3.2 V and have demonstrated modulation with 16 dB of contrast. Smaller devices with bandwidths of as much as 6.1 MHz and predicted switching voltages of less than 10 V were also fabricated.

An atomic force microscope tip designed to measure time-varying nanomechanical forces

Tapping-mode atomic force microscopy (AFM), in which the vibrating tip periodically approaches, interacts and retracts from the sample surface, is the most common AFM imaging method. The tip experiences attractive and repulsive forces that depend on the chemical and mechanical properties of the sample, yet conventional AFM tips are limited in their ability to resolve these time-varying forces. We have created a specially designed cantilever tip that allows these interaction forces to be measured with good (sub-microsecond) temporal resolution and material properties to be determined and mapped in detail with nanoscale spatial resolution. Mechanical measurements based on these force waveforms are provided at a rate of 4 kHz. The forces and contact areas encountered in these measurements are orders of magnitude smaller than conventional indentation and AFM-based indentation techniques that typically provide data rates around 1 Hz. We use this tool to quantify and map nanomechanical changes in a binary polymer blend in the vicinity of its glass transition.

Optical MEMS for Lightwave Communication

The intensive investment in optical microelectromechanical systems (MEMS) in the last decade has led to many successful components that satisfy the requirements of lightwave communication networks. In this paper, we review the current state of the art of MEMS devices and subsystems for lightwave communication applications. Depending on the design, these components can either be broadband (wavelength independent) or wavelength selective. Broadband devices include optical switches, crossconnects, optical attenuators, and data modulators, while wavelength-selective components encompass wavelength add/drop multiplexers, wavelength-selective switches and crossconnects, spectral equalizers, dispersion compensators, spectrometers, and tunable lasers. Integration of MEMS and planar lightwave circuits, microresonators, and photonic crystals could lead to further reduction in size and cost

Scaling internet routers using optics

Routers built around a single-stage crossbar and a centralized scheduler do not scale, and (in practice) do not provide the throughput guarantees that network operators need to make efficient use of their expensive long-haul links. In this paper we consider how optics can be used to scale capacity and reduce power in a router. We start with the promising load-balanced switch architecture proposed by C-S. Chang. This approach eliminates the scheduler, is scalable, and guarantees 100% throughput for a broad class of traffic. But several problems need to be solved to make this architecture practical: (1) Packets can be mis-sequenced, (2) Pathological periodic traffic patterns can make throughput arbitrarily small, (3) The architecture requires a rapidly configuring switch fabric, and (4) It does not work when linecards are missing or have failed. In this paper we solve each problem in turn, and describe new architectures that include our solutions. We motivate our work by designing a 100Tb/s packet-switched router arranged as 640 linecards, each operating at 160Gb/s. We describe two different implementations based on technology available within the next three years.

Displacement-sensitive photonic crystal structures based on guided resonance in photonic crystal slabs

We introduce a mechanically tunable photonic crystal structure consisting of coupled photonic crystal slabs. Using both analytic theory, and first-principles finite-difference time-domain simulations, we demonstrate that a strong variation of transmission and reflection coefficients of light through such structures can be accomplished with only a nanoscale variation of the spacing between the slabs. Moreover, by specifically configuring the photonic crystal structures, high sensitivity can be preserved in spite of significant fabrication-related disorders. We expect such structures to play important roles in micromechanically tunable optical sensors and filters.

Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioning

We describe the design and fabrication of surface-micromachined resonant microscanners that have large scan angles and fast scan speeds. These scanning micromirrors, which are hundreds of micrometers on a side, are driven by electrostatic-comb actuators and have resonant frequencies in the kilohertz range. Fabricated with two or three structural layers of polysilicon, the scanners are compact, extremely light in weight, and potentially very low in cost. Their power consumption is also minimal because the capacitive motors draw very low currents. High-precision positioning (0.01/spl deg/ dynamically and 0.038/spl deg/ statically) over a large angular range (up to 28/spl deg/ optical angle) makes the micromirrors suitable for a variety of optical applications such as laser scanners and printers, displays, holographic data storage, and fiber-optic switches. We have demonstrated microscanners of this type in bar-code readers, which are important devices with a growing number of applications in many industries.

Fast-scanning two-photon fluorescence imaging based on a microelectromechanical systems two- dimensional scanning mirror

Towards overcoming the size limitations of conventional two-photon fluorescence microscopy, we introduce two-photon imaging based on microelectromechanical systems (MEMS) scanners. Single crystalline silicon scanning mirrors that are 0.75 mm x 0.75 mm in size and driven in two dimensions by microfabricated vertical comb electrostatic actuators can provide optical deflection angles through a range of approximately16 degrees . Using such scanners we demonstrated two-photon microscopy and microendoscopy with fast-axis acquisition rates up to 3.52 kHz.

Angular and polarization properties of a photonic crystal slab mirror

It was recently demonstrated that a photonic crystal slab can function as a mirror for externally incident light along a normal direction with near-complete reflectivity over a broad wavelength range. We analyze the angular and polarization properties of such photonic crystal slab mirror, and show such reflectivity occurs over a sizable angular range for both polarizations. We also show that such mirror can be designed to reflect one polarization completely, while allowing 100% transmission for the other polarization, thus behaving as a polarization splitter with a complete contrast. The theoretical analysis is validated by comparing with experimental measurements.

Two-Dimensional MEMS Scanner for Dual-Axes Confocal Microscopy

In this paper, we present a novel 2-D microelectromechanical systems (MEMS) scanner that enables dual-axes confocal microscopy. Dual-axes confocal microscopy provides high resolution and long working distance, while also being well suited for miniaturization and integration into endoscopes for in vivo imaging. The gimbaled MEMS scanner is fabricated on a double silicon-on-insulator (SOI) wafer (a silicon wafer bonded on a SOI wafer) and is actuated by self-aligned vertical electrostatic combdrives. Maximum optical deflections of plusmn4.8deg and plusmn5.5deg are achieved in static mode for the outer and inner axes, respectively. Torsional resonant frequencies are at 500 Hz and 2.9 kHz for the outer and inner axes, respectively. The imaging capability of the MEMS scanner is successfully demonstrated in a breadboard setup. Reflectance images with a field of view of are achieved at 8 frames/s. The transverse resolutions are 3.94 mum and 6.68 mum for the horizontal and vertical dimensions, respectively.

A raster-scanning full-motion video display using polysilicon micromachined mirrors

Abstract As portable computers become more widespread, there is increasing need for lightweight, low-power, inexpensive video displays with high information content. Many established display technologies are useful for large-format displays, but do not satisfy the weight and power requirements of demanding portable display applications. Micromachined raster-scanning displays, however, look attractive for portable computing applications. We describe the operation of a raster-scanning full-motion video display constructed using surface micromachined mirrors. The 41×52 pixel display is interfaced directly to a computer video card. Display resolution is limited by dynamic deformation of the mirror surface. Mirror-scan irregularity is shown to be negligible compared to diffraction from the mirror aperture and dynamic deformation of the mirror surface. The line-scan micromirror has been operated for more than 45 billion cycles with less than 1% change in the mirror resonant frequency.