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Dive into the research topics where Oliver Heimel is active.

Publication


Featured researches published by Oliver Heimel.


Archive | 2010

CARRIER FOR A SUBSTRATE AND A METHOD FOR ASSEMBLING THE SAME

Andre Brüning; Oliver Heimel; Reiner Hinterschuster; Hans Wolf


Archive | 2016

Holding arrangement for substrates

Oliver Heimel; Andre Brüning


Archive | 2008

Rotatable sputter target base, rotatable sputter target, coating installation, method of producing a rotatable sputter target, target base connection means, and method of connecting a rotatable target base device for sputtering installations to a target base support

Lothar Lippert; Oliver Heimel


Archive | 2007

Vacuum transport device with movable guide rail

Oliver Heimel; Andreas Jischke; Dieter Haas


Archive | 2007

Flooding Chamber For Coating Installations

Thomas Gebele; Andreas Lopp; Oliver Heimel


Archive | 2006

Void apparatus with a movable guiding rail

Oliver Heimel; Andreas Jischke; Dieter Haas


Archive | 2011

TWIN-TYPE COATING DEVICE WITH IMPROVED SEPARATING PLATE

Oliver Heimel; Hans Wolf; Joerg Krempel-Hesse; Frank Fuchs


Archive | 2008

FLOODING CHAMBER FOR COATING APPARATUS

Thomas Gebele; Oliver Heimel; Andreas Lopp; ロップ, アンドレアス; ハイメル オリバー; ゲベレ トーマス


Archive | 2013

Carrier for substrates

Oliver Heimel; Ralph Lindenberg; Haraldö Wurster; Claus Zengel


Archive | 2012

Void transmission apparatus with a movable guiding rail

Dieter Haas; Oliver Heimel; Andreas Jischke

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