Olov von Hofsten

High-resolution computed tomography with a compact soft x-ray microscope.

Computed tomography based on high-resolution soft x-ray microscopy utilizes the natural contrast for biological specimens provided by the water window (lambda = 2.4 - 4.4 nm) and the high resolving power of zone plate objectives. It is capable of revealing the 3D structure of biological specimens at sub-visible-microscopic resolution. To date, the technique has only been available at synchrotron-based microscopes, which limits the researchers access. In the present paper we demonstrate high-resolution soft x-ray tomography with a laboratory zone-plate-based soft x-ray microscope. The specimen, a diatom mounted on a glass capillary, was reconstructed from a tilt series of 53 images covering 180 degrees using a filtered back projection algorithm. The resolution of the tomogram was estimated to a half period of 140 nm using a differential-phase-residual method. Cryo-fixation, increased source brightness and extended-depth-of-focus objectives are important for pushing the resolution of compact systems for biological samples.

Cold-developed electron-beam-patterned ZEP 7000 for fabrication of 13 nm nickel zone plates

Cold development was applied to improve the resolution in a trilayer resist that is used for the fabrication of state-of-the-art soft x-ray microscopy zone plates. By decreasing the temperature of the hexyl acetate developer to −50 °C, 11 nm half-pitch gratings have been resolved in the electron-beam resist ZEP 7000. 12 nm half-pitch gratings have been successfully transferred, via the intermediate SiO2 hardmask, into the bottom polyimide layer by CHF3 and O2 reactive ion etching. The trilayer resist, including optimized cold development, has finally been used in an electroplating-based process for the fabrication of nickel zone plates. Zone plates with down to 13 nm outermost zone width have been fabricated and 2.4% average groove diffraction efficiency has been measured for zone plates with 15 nm outermost zone width and a nickel height of 55 nm.

Sub-25-nm laboratory x-ray microscopy using a compound Fresnel zone plate

Improving the resolution in x-ray microscopes is of high priority to enable future applications in nanoscience. However, high-resolution zone-plate optics often have low efficiency, which makes implementation in laboratory microscopes difficult. We present a laboratory x-ray microscope based on a compound zone plate. The compound zone plate utilizes multiple diffraction orders to achieve high resolution while maintaining reasonable efficiency. We analyze the illumination conditions necessary for this type of optics in order to suppress stray light and demonstrate microscopic imaging resolving 25 nm features.

Laboratory soft-x-ray microscope for cryotomography of biological specimens

Soft-x-ray cryotomography allows quantitative and high-resolution three-dimensional imaging of intact unstained cells. To date, the method relies on synchrotron-radiation sources, which limits accessibility for researchers. Here we present a laboratory water-window microscope for cryotomography. It is based on a λ=2.48 nm liquid-jet laser-plasma source, a normal-incidence multilayer condenser, a 30 nm zone-plate objective, and a cryotilt sample holder. We demonstrate high-resolution imaging, as well as quantitative tomographic imaging, of frozen intact cells. The reconstructed tomogram of the intracellular local absorption coefficient shows details down to ∼100 nm.

Numerical model for tomographic image formation in transmission x-ray microscopy

We present a numerical image-formation model for investigating the influence of partial coherence, sample thickness and depth-of-focus on the accuracy of tomographic reconstructions in transmission x-ray microscopes. The model combines wave propagation through the object by finite difference techniques with Fourier methods. We include a ray-tracing model to analyse the origin of detrimental stray light in zone plate-based x-ray microscopes. These models allow optimization of x-ray microscopy systems for quantitative tomographic imaging of thick objects. Results show that both the depth-of-focus and the reconstructed local absorption coefficient are highly dependent on the degree of coherence of the optical system.

High-aspect-ratio germanium zone plates fabricated by reactive ion etching in chlorine

This article describes the fabrication of soft x-ray germanium zone plates with a process based on reactive ion etching (RIE) in Cl-2. A high degree of anisotropy is achieved by sidewall passivat ...

Compact high-resolution differential interference contrast soft x-ray microscopy

We demonstrate high-resolution x-ray differential interference contrast (DIC) in a compact soft x-ray microscope. Phase contrast imaging is enabled by the use of a diffractive optical element objective which is matched to the coherence conditions in the microscope setup. The performance of the diffractive optical element objective is evaluated in comparison with a normal zone plate by imaging of a nickel siemens star pattern and linear grating test objects. Images obtained with the DIC optic exhibit typical DIC enhancement in addition to the normal absorption contrast. Contrast transfer functions based on modulation measurements in the obtained images show that the DIC optic gives a significant increase in contrast without reducing the spatial resolution. The phase contrast operation mode now available for our compact soft x-ray microscope will be a useful tool for future studies of samples with low absorption contrast.

13 nm high-efficiency nickel-germanium soft x-ray zone plates

Zone plates are used as objectives for high-resolution x-ray microscopy. Both high resolution and high diffraction efficiency are crucial parameters for the performance of the lens. In this article, the authors demonstrate the fabrication of high-resolution soft x-ray zone plates with improved diffraction efficiency by combining a nanofabrication process for high resolution with a process for high diffraction efficiency. High-resolution Ni zone plates are fabricated by applying cold development of electron-beam-patterned ZEP 7000 in a trilayer-resist process combined with Ni-electroplating. High-diffraction-efficiency Ni–Ge zone plates are realized by fabricating the Ni zone plate on a Ge film and then using the finished zone plate as etch mask for anisotropic CHF3 reactive ion etching into the underlying Ge, resulting in a Ni–Ge zone plate with improved aspect ratio and zone plate efficiency. Ni–Ge zone plates with 13 nm outermost zone width composed of 35 nm Ni on top of 45 nm Ge were fabricated. For co...

Theoretical development of a high-resolution differential-interference-contrast optic for x-ray microscopy

In this paper, the theoretical background and development of a differential-interference contrast (DIC) x-ray optic is presented. The single-element optic is capable of high-resolution phase contrast imaging and is compatible with compact sources. It is shown that an understanding of the coherence requirements in this type of imaging is imperative and is explained in detail. The optic is capable of a wavefront separation equal to the resolution of the optic which places only minor constraints on the object illumination.

Nickel-germanium soft x-ray zone plates

This article presents a fabrication process for soft x-ray zone plates in which nickel and germanium are combined to achieve high diffraction efficiency. A nickel zone plate is first fabricated o ...