Ornwasa Traisigkhachol

Investigation of Alternative Materials to Si for Solid State Micro Joints

A joint’s function is to allow a relative motion between two components. While macroscopic joints typically use bearings or hinges to accomplish articulation, Micro Electro-mechanical Systems (MEMS) commonly take advantage of solid state joints, typically comprising bending or torsion beams. Micro joints made of NiW and the epoxy SU-8™ were fabricated by thin-film techniques and simulated in their usability as spring material. For determining the spring constant of the cantilever beams intended as solid state micro joints, a Hysitron TriboIndenter™ was used. It could be demonstrated that NiW represents a material well suited for sensitive solid state joints. Also SU-8™ as solid state joint was suitable to be applied as a cantilever. SU-8™ cantilevers can be used for higher displacements at greater loads.Copyright