Osamu Matsunaga
Tosoh
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Publication
Featured researches published by Osamu Matsunaga.
Thin Solid Films | 1998
Kentaro Utsumi; Osamu Matsunaga; Tsutomu Takahata
Abstract The ultra high density ITO target of 99% or more in relative density has developed by the improvements of the ITO powder and the sintering process. Sputtering test on various densities (90, 97 and 99%) of ITO (SnO2: 10 wt.%) targets was performed in a dc magnetron sputtering system. The minimum resistivity of the thin film was obtained at 0.1% in O2/Ar for each of the targets, and was 149 (μΩ×cm) for the 99% target, 159 (μΩ×cm) for the 97% one and 161 (μΩ×cm) for the 90% one, respectively. Hall effect measurement revealed that the improvement of the resistivity with an increase in the target density is due to the carrier concentration increase. ITO films prepared with different density targets were analyzed by means of EPMA, SEM, XRD and ESCA. However, no differences in microstructure were recognized between them.
Archive | 1997
Osamu Matsunaga; Yuichi Nagasaki; Tsutomu Takahata
Archive | 1996
Osamu Matsunaga; Akio Kondo
Archive | 2004
Koyata Takahashi; Osamu Matsunaga; Michio Okamoto
Archive | 2003
Koyata Takahashi; Masanori Kohgo; Osamu Matsunaga
Archive | 1996
Kentaro Utsumi; Toshiya Takahara; Akio Kondo; Osamu Matsunaga
Archive | 2007
Akio Kondo; Osamu Matsunaga; Toshiya Takahara; Kentaro Uchiumi; 健太郎 内海; 修 松永; 昭夫 近藤; 俊也 高原
Archive | 2003
Masanori Kohgo; Osamu Matsunaga; Koyata Takahashi
Archive | 2004
Koyata Takahashi; Masanori Mukajiri; Osamu Matsunaga
Archive | 2004
Osamu Matsunaga; Michio Okamoto; Koyata Takahashi