P. Fürjes

Porous silicon-based humidity sensor with interdigital electrodes and internal heaters

A novel design of a one wafer side processed porous silicon-based humidity sensor with interdigital electrodes is presented. An integrated heater element over the porous layer provides the effective heating and the low power consumption of the device. Reliable contacts between metal and porous Si are formed via crystalline n-Si islands within the porous layer, formed by exploiting the selectivity of the electrochemical etching process. The effects of the electrode and heater geometry and also the parameters of the porous matrix are investigated with special emphasis on response and recovery time. To ensure the adequate thermal conditions sensor structures and packaging techniques were also investigated. The applied heater geometry results in faster recovery at a cost of reduced power consumption.

Calibration-Less Sizing and Quantitation of Polymeric Nanoparticles and Viruses with Quartz Nanopipets

The feasibility of using quartz nanopipets as simple and cost-effective Coulter counters for calibration-less quantitation and sizing of nanoparticles by resistive pulsing sensing (RPS) was investigated. A refined theory was implemented to calculate the size distribution of nanoparticles based on the amplitude of resistive pulses caused by their translocation through nanopipets of known geometry. The RPS provided diameters of monodisperse latex nanoparticles agreed within the experimental error with those measured by using scanning electron microscopy (SEM), dynamic light scattering (DLS), and nanoparticle tracking analysis (NTA). The nanopipet-based counter, by detecting individual nanoparticles, could resolve with similar resolution as SEM mixtures of monodisperse nanoparticles having partially overlapping size distributions, which could not be discriminated by DLS or NTA. Furthermore, by calculating the hydrodynamic resistance of the nanopipets and consequently the volume flow through the tip enabled for the first time the calibration-less determination of nanoparticle concentrations with nanopipets. The calibration-less methodology is applied to sizing and quantitation of inactivated poliovirus of ~26 nm diameter, which is the smallest size spherical shape virus ever measured by resistive pulse sensing.

Materials and processing for realization of micro-hotplates operated at elevated temperature

Micro-pellistors and conductivity-type gas sensors are among the most promising candidates for the monolith integration of gas-sensing elements in olfactory gas detection. Both types have to be operated at elevated temperatures of 200–600 °C; therefore, the formation of thermally isolated integral micro-hotplates is the key element in the development of the array. In this paper, the alternative processes are discussed with emphasis on thermal isolation, selection of the appropriate structural materials, formation of stable contacts to the filaments and deposition of gas-sensitive layers. The results of thermal and mechanical model calculations were confirmed by experimental measurements.

Thermal investigation of micro-filament heaters

The present work is a study of the thermal properties of integrable micro-filaments. The realised structure is the key element of the targeted integrable micro-pellistor for catalytic gas sensing, therefore, its thermal characterisation is of crucial importance. Direct measurement of temperature in the micro-heater is unfortunately troublesome due to the small dimensions used. In this work the temperature of the micro-filament was measured by two different methods, based upon the resistance alteration of the filament, and analysis of the thermal radiation of the heated micro-filament. The reason for the differences was explained by inherent features of the methods, and confirmed by thermal simulation.

Thermopile antennas for detection of millimeter waves

A thermopile structure is proposed for the detection of microwave/millimeter wave radiation. The thermopairs in the suggested linear arrangement function as antennas. 5.58 V/W responsivity was achieved at 100 GHz with 40 serial connected thermopairs. The experimentally observed polarity and frequency dependence convincingly verify the proper detector operation.

Efficient catalytic combustion in integrated micropellistors

This paper analyses two of the key issues of the development of catalytic combustion-type sensors: the selection and production of active catalytic particles on the micropellistor surface as well as the realization of a reliable thermal conduction between heater element and catalytic surface, for the sensing of temperature increase produced by the combustion. The report also demonstrates that chemical sensor product development by a MEMS process is a continuous struggle for elimination of all uncertainties influencing reliability and sensitivity of the final product.

Automated single cell isolation from suspension with computer vision

Current robots can manipulate only surface-attached cells seriously limiting the fields of their application for single cell handling. We developed a computer vision-based robot applying a motorized microscope and micropipette to recognize and gently isolate intact individual cells for subsequent analysis, e.g., DNA/RNA sequencing in 1–2 nanoliters from a thin (~100 μm) layer of cell suspension. It can retrieve rare cells, needs minimal sample preparation, and can be applied for virtually any tissue cell type. Combination of 1 μm positioning precision, adaptive cell targeting and below 1 nl liquid handling precision resulted in an unprecedented accuracy and efficiency in robotic single cell isolation. Single cells were injected either into the wells of a miniature plate with a sorting speed of 3 cells/min or into standard PCR tubes with 2 cells/min. We could isolate labeled cells also from dense cultures containing ~1,000 times more unlabeled cells by the successive application of the sorting process. We compared the efficiency of our method to that of single cell entrapment in microwells and subsequent sorting with the automated micropipette: the recovery rate of single cells was greatly improved.

Optimized Simulation and Validation of Particle Advection in Asymmetric Staggered Herringbone Type Micromixers

This paper presents and compares two different strategies in the numerical simulation of passive microfluidic mixers based on chaotic advection. In addition to flow velocity field calculations, concentration distributions of molecules and trajectories of microscale particles were determined and compared to evaluate the performance of the applied modeling approaches in the proposed geometries. A staggered herringbone type micromixer (SHM) was selected and studied in order to demonstrate finite element modeling issues. The selected microstructures were fabricated by a soft lithography technique, utilizing multilayer SU-8 epoxy-based photoresist as a molding replica for polydimethylsiloxane (PDMS) casting. The mixing processes in the microfluidic systems were characterized by applying molecular and particle (cell) solutions and adequate microscopic visualization techniques. We proved that modeling of the molecular concentration field is more costly, in regards to computational time, than the particle trajectory based method. However, both approaches showed adequate qualitative agreement with the experimental results.

Tilted pillar array fabrication by the combination of proton beam writing and soft lithography for microfluidic cell capture: Part 1 Design and feasibility

Design, fabrication, integration, and feasibility test results of a novel microfluidic cell capture device is presented, exploiting the advantages of proton beam writing to make lithographic irradiations under multiple target tilting angles and UV lithography to easily reproduce large area structures. A cell capture device is demonstrated with a unique doubly tilted micropillar array design for cell manipulation in microfluidic applications. Tilting the pillars increased their functional surface, therefore, enhanced fluidic interaction when special bioaffinity coating was used, and improved fluid dynamic behavior regarding cell culture injection. The proposed microstructures were capable to support adequate distribution of body fluids, such as blood, spinal fluid, etc., between the inlet and outlet of the microfluidic sample reservoirs, offering advanced cell capture capability on the functionalized surfaces. The hydrodynamic characteristics of the microfluidic systems were tested with yeast cells (similar size as red blood cells) for efficient capture.

Surface Modification of PDMS Based Microfluidic Systems by Tensides

The material aspects of a polymer based microfluidic structure were characterised considering the compatibility of the system with bioanalytical applications. The polydimethylsiloxane (PDMS) based channel system is to be integrated in a full polymer photonic biosensor device developed within the European Union project P3SENS (FP7-ICT4-248304). This work is intended to define a modified material composition, which is appropriate to improve both the wettability and the non-specific protein binding characteristics of the PDMS significantly. Triton X-100 (Sigma-Aldrich) surfactant was added to the raw PDMS before polymerisation. The influence of the tenside was studied considering the polymerisation reaction, the surface characteristics and the functional applicability. To test the hydrodynamic behaviour and non-specific protein adsorption on the surfaces, phosphate buffered saline (PBS) solution and fluorescent labelled human serum albumin (HSA) was applied in a microfluidic capillary system.