P. Haible

Speckle interferometry with temporal phase evaluation for measuring large-object deformation.

We propose a new method for measuring large-object deformations byusing temporal evolution of the speckles in speckleinterferometry. The principle of the method is that by deformingthe object continuously, one obtains fluctuations in the intensity ofthe speckle. A large number of frames of the object motion arecollected to be analyzed later. The phase data for whole-objectdeformation are then retrieved by inverse Fourier transformation of afiltered spectrum obtained by Fourier transformation of thesignal. With this method one is capable of measuring deformationsof more than 100 mum, which is not possible using conventionalelectronic speckle pattern interferometry. We discuss theunderlying principle of the method and the results of theexperiments. Some nondestructive testing results are alsopresented.

Wavelength-shift speckle interferometry for absolute profilometry using a mode-hop free external cavity diode laser

Abstract In this paper we present an absolute surface topography measurement with a tuneable diode laser with an external cavity that has a tuning range of as much as 25 nm without mode hops and a very high tuning speed of less than 1 s for the whole range. With this laser, an absolute wavelength-shift speckle pattern interferometer was realized, capable of measuring optically smooth and rough surfaces. We briefly explain the principles of operation, and the importance of wavelength tuning without mode hops. We discuss the capabilities, possible measuring ranges and some results as well as calibration methods of wavelength-shift speckle profilometry.

Large in-plane displacement measurement in dual-beam speckle interferometry using temporal phase measurement

Measurement of in-plane displacements of a diffuse object by observing the temporal fluctuation of the speckle pattern in a dual-beam illumination speckle interferometer is illustrated. To conceive the temporal changes the object is displaced in its plane continuously. A high-speed camera is used to acquire a number of frames of the image of the object motion sequentially. Through Fourier transformation and inverse Fourier transformation of the frames stacked together, the total phase is determined. Finally, the magnitude of the in-plane displacement of the object motion is extracted. The range of displacement that can be measured using this novel method lies between few microns and over 100 μm on the upper end. Theory together with experimental results are presented in this paper.

NOVEL TEMPORAL FOURIER TRANSFORM SPECKLE PATTERN SHEARING INTERFEROMETER

A method to measure the derivative of displacement using time variation changes in the object together with Fourier transform analysis in speckle shear interferometry is presented. The concept of the method is that the object is deformed continuously and a large number of sheared images of the object motion are acquired using a high speed CCD camera. The derivative of the object deformation is then retrieved from this large set of data using Fourier transformation. The method is capable of obtaining information for object displacements over 500 µm, which is a very difficult task when using conventional electronic speckle pattern shearing interferometry. Theory as well as some of the experimental results with the new method are delineated.

SPECKLE INTERFEROMETRY WITH TEMPORAL PHASE EVALUATION : INFLUENCE OF DECORRELATION, SPECKLE SIZE, AND NONLINEARITY OF THE CAMERA

Recently, a new method to measure object shape and deformation with temporal evolution of speckles in speckle interferometry was reported. In this method, certain parameters, sensitive to shape or deformation are changed continuously, and the fluctuations in the irradiance of each speckle is recorded. The information over the whole object deformation is retrieved by Fourier-transformation techniques. We present a detailed theory and analyze the influence of decorrelation due to longitudinal and lateral size of the speckles. It is also shown that the method can be used to measure small deformations (less than 5 microm) with higher resolution. Further, the nonlinearity of the camera is shown to enhance the sensitivity.

Shape Measurement by use of Temporal Fourier transformation in Dual-Beam Illumination Speckle Interferometry.

We outline a novel method for determining the shape of an object by use of temporal Fourier-transform analysis in dual-beam illumination speckle interferometry. The object whose shape is to be determined is rotated about an axis, and a number of frames of the image of the object motion are acquired. Temporal in-plane displacement that is due to the object rotation is related to the shape of the object and is retrieved from this large set of data by Fourier transformation. With this method one can determine the absolute height of the object with variable resolution, thereby allowing shapes of objects with large and small slopes to be determined. The theory of the method along with experimental results is presented.

Heterodyne temporal speckle-pattern interferometry.

In temporal speckle-pattern interferometry deformation information is extracted by a Fourier transform technique from the speckle pattern that is recorded over a period of time as the object is deformed. A limitation of the experimental arrangements reported to date is that the direction of the deformation cannot be determined. We propose removing this limitation by using the heterodyne principle. Some experimental results that were obtained by use of a rotating half-wave-plate frequency shifter are presented.

Fast Coherence Scanning Interferometry for Measuring Smooth, Rough and Spherical Surfaces

Abstract Coherence scanning interferometry is a useful instrument for measuring the geometry of a wide range of surfaces with high resolution. By introducing two objectives with a high numerical aperture in both arms of a Michelson interferometer it is possible to investigate spherical and aspherical surfaces. In addition to classical interferometry, the method can be applied to smooth, rough or separated surfaces.

Spectral and temporal phase evaluation for interferometry and speckle applications

Interferometry using a single wavelength delivers the surface topography and surface heights of optically polished surfaces. However, discrete steps and holes cannot be determined, the sensitivity is fixed, and the analysis of optically rough surfaces is not possible. Some of these limitations can be overcome by using two or more wavelengths. In wavelength scanning interferometry, the frequency of the modulation induced by the wavelength change is determined independently for each image pixel. The tuning range determines the resolution of measurements, while the tuning step limits the range of the measurements. Laser diodes can be tuned, but an external cavity is needed for a larger mode hop free wavelength variation. Polished and optically rough surfaces can be analyzed in the same manner. In a new development, the application of temporal evaluation of speckles for deformation and shape measurement will be discussed. It turns out that spectral and temporal phase analysis can be very useful for many applications in optical metrology. Experimental results will support the methods discussed.

Nondestructive testing using temporal phase evaluation in speckle interferometry

A novel nondestructive testing (NDT) method is reported in which temporal evolution of the speckles in speckle interferometry is used to measure large object deformations. The basic principle of the method is that continuous object movement introduces fluctuations in the phase of the speckle and is recorded as intensity modulation. Acquiring a large number of frames of the object motion, the phase data for the whole object deformation are then retrieved by the Fourier transformation technique. The method is capable of measuring more than 100 μm in-plane and out-of-plane deformation with speckle interferometry and more than 500 μm for speckle shearing interferometry. The authors discuss the NDT results obtained with the three methods and make some relative comparisons of each.