Panos G. Datskos

Cantilever transducers as a platform for chemical and biological sensors

Since the late 1980s there have been spectacular developments in micromechanical or microelectro-mechanical (MEMS) systems which have enabled the exploration of transduction modes that involve mechanical energy and are based primarily on mechanical phenomena. As a result an innovative family of chemical and biological sensors has emerged. In this article, we discuss sensors with transducers in a form of cantilevers. While MEMS represents a diverse family of designs, devices with simple cantilever configurations are especially attractive as transducers for chemical and biological sensors. The review deals with four important aspects of cantilever transducers: (i) operation principles and models; (ii) microfabrication; (iii) figures of merit; and (iv) applications of cantilever sensors. We also provide a brief analysis of historical predecessors of the modern cantilever sensors.

Role of hydrogen in chemical vapor deposition growth of large single-crystal graphene.

We show that graphene chemical vapor deposition growth on copper foil using methane as a carbon source is strongly affected by hydrogen, which appears to serve a dual role: an activator of the surface bound carbon that is necessary for monolayer growth and an etching reagent that controls the size and morphology of the graphene domains. The resulting growth rate for a fixed methane partial pressure has a maximum at hydrogen partial pressures 200-400 times that of methane. The morphology and size of the graphene domains, as well as the number of layers, change with hydrogen pressure from irregularly shaped incomplete bilayers to well-defined perfect single layer hexagons. Raman spectra suggest the zigzag termination in the hexagons as more stable than the armchair edges.

Femtogram mass detection using photothermally actuated nanomechanical resonators

Nanomechanical devices with very small mass and size have the potential for mass sensing at the level of individual molecules. In the present study, we designed nanomechanical mass sensors, demonstrated their operation under ambient pressure and temperature, and achieved femtogram-level mass sensitivity. Our nanomechanical resonators were gold-coated silicon cantilevers with resonance frequencies in the range of 1 to 10 MHz, characteristic thicknesses of 50–100 nm, and force constants of about 0.1 N/m. Using a cantilever with a resonant frequency of 2.2 MHz that was excited photothermally, we measured a mass change of 5.5 fg upon chemisorption of 11-mercaptoundecanoic acid. Our analysis indicates that, by decreasing the mass of the cantilever and increasing the excitation amplitude, even higher mass sensitivity can be realized in an easily accessible frequency range (<100 MHz).

Performance of uncooled microcantilever thermal detectors

It has recently been shown that bimaterial microcantilevers can be used as uncooled infrared detectors. Bimaterial microcantilevers deform as their temperature changes due to the absorption of infrared photons. Infrared imaging using uncooled cantilever arrays has already been achieved by a number of groups. In this paper, we examined the performance of microcantilevers as uncooled infrared detectors with optical readout. As in the case of other kinds of uncooled thermal infrared detectors, temperature fluctuation noise and background fluctuation noise are fundamental limits to the performance of microcantilever thermal detectors. Since microcantilevers are mechanical devices, thermo-mechanical noise will also influence their performance. We fabricated a SiNx microcantilever thermal detector with an Al layer in the bimaterial region. For the microcantilever geometry and materials used, the background fluctuation noise equivalent temperature difference, NETDBF, calculated for f/1 optics and a 30 Hz frame r...

Remote optical detection using microcantilevers

The feasibility of microcantilever‐based optical detection is demonstrated. Microcantilevers may provide a simple means for developing single‐element and multielement infrared sensors that are smaller, more sensitive, and lower in cost than quantum well, thermoelectric, or bolometric sensors. Here we specifically report here on an evaluation of laboratory prototypes that are based on commercially available microcantilevers, such as those used in atomic force microscopy. In this work, optical transduction techniques were used to measure microcantilever response to remote sources of thermal energy. The noise equivalent power at 20 Hz for room temperature microcantilevers was found to be approximately 3.5 nW/√Hz, with a specific detectivity of 3.6×107 cm Hz1/2/W, when an uncoated microcantilever was irradiated by a low‐power diode laser operating at 786 nm. Operation is shown to be possible from dc to kHz frequencies, and the effect of cantilever shape and the role of absorptive coatings are discussed. Finally, spectral response in the midinfrared is evaluated using both coated and uncoated microcantilevers.

Uncooled thermal imaging using a piezoresistive microcantilever

The operation of an uncooled, microcantilever‐based infrared (IR) imaging device is demonstrated. Bending of the microcantilever is a function of the IR radiation intensity incident on the cantilever surface. The infrared image of the source is obtained by rastering a microfabricated cantilever over the image formed at the focal plane of a concave mirror. The bending variation of the microcantilever, as it scanned the focal plane of the mirror, is used to construct an infrared image of the source in front of the mirror. The thermal image obtained by scanning a single element cantilever is presented.

Photoinduced and thermal stress in silicon microcantilevers

The photogeneration of free charge carriers in a semiconductor gives rise to mechanical strain. We measured the deflection of silicon microcantilevers resulting from photoinduced stress. The excess charge carriers responsible for the photoinduced stress, were produced via photon irradiation from a diode laser with wavelength λ=780 nm. For Si microcantilevers, the photoinduced stress is of opposite direction and about four times larger than the stress resulting from only thermal excitation. In this letter we report on our study of the photoinduced stress in silicon microcantilevers and discuss their temporal and photometric response.

Electrical and thermal conductivity of low temperature CVD graphene: the effect of disorder

In this paper we present a study of graphene produced by chemical vapor deposition (CVD) under different conditions with the main emphasis on correlating the thermal and electrical properties with the degree of disorder. Graphene grown by CVD on Cu and Ni catalysts demonstrates the increasing extent of disorder at low deposition temperatures as revealed by the Raman peak ratio, IG/ID. We relate this ratio to the characteristic domain size, La, and investigate the electrical and thermal conductivity of graphene as a function of La. The electrical resistivity, ρ, measured on graphene samples transferred onto SiO2/Si substrates shows linear correlation with La(-1). The thermal conductivity, K, measured on the same graphene samples suspended on silicon pillars, on the other hand, appears to have a much weaker dependence on La, close to K∼La1/3. It results in an apparent ρ∼K3 correlation between them. Despite the progressively increasing structural disorder in graphene grown at lower temperatures, it shows remarkably high thermal conductivity (10(2)-10(3) W K(-1) m(-1)) and low electrical (10(3)-3×10(5) Ω) resistivities suitable for various applications.

Remote infrared radiation detection using piezoresistive microcantilevers

A novel micromechanical infrared (IR) radiation sensor has been developed using commercially available piezoresistive microcantilevers. Microcantilevers coated with a heat absorbing layer undergo bending due to the differential stress between the top layer (coating) and the substrate. The bending causes a change in the piezoresistance and is proportional to the amount of heat absorbed. The microcantilever IR sensor exhibits two distinct thermal responses: a fast one (<ms) and a slower one (∼10 ms). A noise equivalent power (at a modulation frequency of 30 Hz) was estimated to be ∼70 nW/Hz1/2. This value can be further reduced by designing microcantilevers with better thermal isolation that can allow microcantilevers to be used as uncooled IR radiation detectors.

Gold Nano-Structures for Transduction of Biomolecular Interactions into Micrometer Scale Movements

Microfabricated cantilevers, similar to those commonly used in scanning probe microscopies, have recently become increasingly popular as transducers in chemical and biological sensors. Surface stress changes that accompany intermolecular interactions on the cantilever surfaces offer an attractive means to develop new generations of microfabricated sensors and actuators that respond directly to chemical stimuli. In the present study, we demonstrate that interfacial molecular recognition events can be converted into mechanical responses much more efficiently when quasi 3-dimensional interfaces with nano-size features are used. Some of the particularly useful approaches to creating such interfaces are surface immobilization of gold nano-spheres and dealloying of co-evaporated Au:Ag films. Preliminary evaluation of these nanostructured surfaces was performed by measuring mechanical stresses generated by receptor modified nano-structures and smooth gold surfaces in response to gas-phase hydrocarbon compounds. The most efficient chemi-mechanical transduction was achieved when the cantilevers were modified with 50 to 75 nm thick dealloyed gold nanostrutures. Cantilevers of this type were selected for liquid phase experiments. These cantilevers were found to undergo several micron deflections upon adsorption of protein A and biotin-labeled albumin on nanostructured gold surfaces. Additional micrometer scale movements of the cantilevers were observed upon interaction of the surface bound bioreceptors with, respectively, immunoglobulin G and avidin from the aqueous phase.