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Park Chang Min

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Publication

Featured researches published by Park Chang Min.

Archive | 2004

Measurement method for overlay mark and align key

Lee Si Hyeung; Kim Hyung Do; Park Chang Min

Archive | 2016

APPARATUS FOR PROTECTING EXTREME ULTRA VIOLET(EUV) MASK, AND EUV EXPOSURE APPARATUS COMPRISING THE SAME

Hwang Myung Soo; Park Joo On; Park Chang Min

Archive | 2014

EXPOSING METHOD AND METHOD OF FORMING A PATTERN USING THE EXPOSING METHOD

Kim In Sung; Park Chang Min; Yeo Jeong Ho

Archive | 2013

METHOD OF MANUFACTURING A MASK AND APPARATUS FOR PERFORMING THE SAME

Heo Jin Seok; Park Chang Min; Oh Seok Hwan; Yeo Jeong Ho

Archive | 2011

EXPOSURE APPARATUS AND METHODS OF EXPOSURE USING THE SAME

Lee Ji Eun; Kim In Sung; Yeo Jeong Ho; Park Chang Min; Yoon Je Bum

Archive | 2011

BLANK PHOTOMASK AND REFLECTIVE PHOTOMASK HAVING A FIDUCIAL POSITION ALIGN MARK AND METHODS OF FABRICATING THE SAME

Park Chang Min; Park Joo On; Yeo Jeong Ho

Archive | 2011

REFLECTIVE RETICLE CHUCK AND REFLECTIVE ILLUMINATION SYSTEM INCLUDING THE SAME, METHOD OF IMPROVING FLATNESS OF REFLECTIVE RETICLE AND MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME

Heo Jin Seok; Park Chang Min; Yeo Jeong Ho; Park Joo On; Kim In Sung

Archive | 2011

METHOD OF INSPECTING A STRUCTURE

Woo Seouk Hoon; Yeo Jeong Ho; Cho Byeong Ok; Park Joo On; Park Chang Min; Kim Won Sun

Archive | 2010

FLARE EVLAUATION METHOD

Kim In Sung; Park Joo On; Goo Doo Hoon; Lee Jeong Hoon; Park Chang Min

Archive | 2010

METHODS OF FORMING A FINE PATTERN USING A NANOIMPRINT LITHOGRAPHY

Lee Jeong Hoon; Yeo Jeong Ho; Park Joo On; Kim In Sung; Goo Doo Hoon; Park Jin Hong; Park Chang Min

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Collaboration

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