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Paul Francis Petric

Varian Associates

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Publication

Featured researches published by Paul Francis Petric.

Archive | 1984

Charged particle beam lithography machine incorporating localized vacuum envelope

Paul Francis Petric

Archive | 1983

Envelope apparatus for localized vacuum processing

John R. Lamattina; Paul Francis Petric

Archive | 1982

Gap control system for localized vacuum processing

Paul Francis Petric; Michael Stephen Foley; Mark W. Utlaut; Joseph A. Laiacano

Archive | 1983

Apparatus for positioning a workpiece in a localized vacuum processing system

Paul Francis Petric; Michael Stephen Foley; John J Waz; Robert W. Milgate

Archive | 1982

Charged particle beam exposure system utilizing variable line scan

Norman J. Taylor; Paul Francis Petric

Archive | 1983

Localized vacuum processing apparatus

Paul Francis Petric; Michael Stephen Foley

Archive | 1984

Vorrichtung zum positionieren eines werkstuecks in einem system zur behandlung unter lokalisiertem vakuum An apparatus for positioning a werkstuecks in a system for treating localized under vacuum

Paul Francis Petric; Michael Stephen Foley; John J Waz; Iii Robert W Milgate

Archive | 1984

Vorrichtung zum befestigen an einer vakuumbearbeitungskammer fuer lokalisierte vakuumbearbeitung eines werkstuecks Apparatus for attaching to a vacuum processing chamber for localized vacuum processing of a werkstuecks

Michael Stephen Foley; Paul Francis Petric

Archive | 1984

An apparatus for positioning a werkstuecks in a system for treating localized under vacuum

Paul Francis Petric; Michael Stephen Foley; John J Waz; Iii Robert W Milgate

Archive | 1983

Dispositif de traitement comportant des moyens de production d'un vide localisé

John R. Lamattina; Paul Francis Petric

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Michael Stephen Foley

Varian Associates

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John J Waz

Varian Associates

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John R. Lamattina

Varian Associates

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Joseph A. Laiacano

Varian Associates

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Mark W. Utlaut

Varian Associates

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Norman J. Taylor

Varian Associates

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Robert W. Milgate

Varian Associates

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