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Dive into the research topics where Paul Stephen McLeod is active.

Publication


Featured researches published by Paul Stephen McLeod.


Archive | 2000

Sputter deposition utilizing pulsed cathode and substrate bias power

Paul Stephen McLeod


Archive | 2001

Target fabrication method for cylindrical cathodes

Paul Stephen McLeod


Archive | 1977

Controlled reflectance of sputtered aluminum layers

Larry Dowd Hartsough; Paul Stephen McLeod


Archive | 2002

Method and apparatus for sputter deposition of multilayer films

Paul Stephen McLeod


Archive | 2002

Hollow cathode sputter source

Paul Stephen McLeod


Archive | 2005

Apparatus and method for selectively and controllably electrically biasing a plurality of substrates on a pallet

Paul Stephen McLeod


Archive | 2002

In-line, pass-by method for vapor lubrication

Paul Stephen McLeod


Archive | 2000

Sputtering target assembly and method for depositing a thickness gradient layer with narrow transition zone

Shanghsien Rou; Alexander Boris Khazanov; Jie-Ming Yu; Paul Stephen McLeod; Mark A. Shows; Kuo-Hsing Hwang; Chung-Yuang Shih


Archive | 2003

Timing apparatus and method to selectively bias during sputtering

Paul Stephen McLeod


Archive | 2003

Single disc vapor lubrication

Michael Joseph Stirniman; Paul Stephen McLeod

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