Peter Murer
Ciba Specialty Chemicals
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Publication
Featured researches published by Peter Murer.
Advances in Resist Technology and Processing XX | 2003
Toshikage Asakura; Hitoshi Yamato; Akira Matsumoto; Peter Murer; Masaki Ohwa
Recently a new non-ionic PAG was developed and its performance was evaluated in a model ArF photoresist formulation. The development profile of the photoresist including the new PAG was studied in detail by using dissolution rate measurement (DRM) apparatus and compared with popular PAGs, such as triphenylsulfonium triflate (TPST), bis(p-ter-butylphenyl)iodonium triflate (BTIT) and 5-norbornene-2,3-dicarboximidyl trifluoromethanesulfonate (NDIT). As the consequences, the photoefficiency of the new PAG was higher than BTIT and NDIT and comparable to TPST. From the DRM results, the new PAG showed a high contrast (high tan θ value). In addition, the simulation based on the results of DRM suggested that the new PAG is superior to TPST in terms of resolution and depth of focus (DOF) latitude.
Archive | 2004
Hitoshi Yamato; Toshikage Asakura; Akira Matsumoto; Peter Murer; Tobias Hintermann
Archive | 2009
Beat Schmidhalter; Thomas Schäfer; Peter Murer; Kristina Bardon; Stephan Allenbach; Andrea Ricci
Archive | 2008
Thomas Schäfer; Peter Murer; Gisèle Baudin; Manuela Kocher; François Maike; Stephan Allenbach; Rosemarie Sift; Beat Schmidhalter
Archive | 2010
Mathias Dueggeli; Olivier Frédéric Aebischer; Pascal Hayoz; Marta Fonrodona Turon; Mathieu Turbiez; Jean-Charles Flores; Hans Juerg Kirner; Peter Murer; Natalia Chebotareva; Thomas Schaefer
Archive | 2007
Frédérique Wendeborn; Beat Schmidhalter; Thomas Schäfer; Peter Murer; Kristina Bardon
Chimia | 2008
Hansjörg Grützmacher; Jens Geier; Daniel Stein; Timo Ott; Hartmut Schönberg; Reinhard H. Sommerlade; Souad Boulmaaz; Jean-Pierre Wolf; Peter Murer; Thomas Ulrich
Archive | 2005
Peter Murer; Jean-Pierre Wolf; Stephan Burkhardt; Hansjörg Grützmacher; Daniel Stein; Kurt Dietliker
Archive | 2004
Hitoshi Yamato; Toshikage Asakura; Akira Matsumoto; Peter Murer; Tobias Hintermann
Archive | 2009
Beat Schmidhalter; Thomas Schäfer; Peter Murer; Kristina Bardon; Stephan Allenbach; Andrea Ricci
