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Peter van der Meulen

Brooks Automation, Inc.

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Publication

Featured researches published by Peter van der Meulen.

Archive | 2007

Methods and systems for controlling a semiconductor fabrication process

Patrick D. Pannese; Vinaya Kavathekar; Peter van der Meulen

Archive | 2008

Semiconductor wafer handling and transport

Peter van der Meulen; Christopher C. Kiley; Patrick D. Pannese; Raymond S. Ritter; Thomas A. Schaefer

Archive | 2007

Semiconductor manufacturing process modules

Peter van der Meulen; Christopher C. Kiley; Patrick D. Pannese

Archive | 2008

Mid-entry load lock for semiconductor handling system

Peter van der Meulen

Archive | 1998

APPARATUS AND METHOD FOR TRANSPORTING SUBSTRATES

Ruth Ann Hendrickson; Peter van der Meulen

Archive | 2011

Stacked process modules for a semiconductor handling system

Peter van der Meulen

Archive | 2006

Linear semiconductor processing facilities

Peter van der Meulen

Archive | 2007

Wafer center finding

Christopher C. Kiley; Peter van der Meulen; Forest Buzan; Paul E. Fogel

Archive | 2009

SUBSTRATE CONTAINER SEALING VIA MOVABLE MAGNETS

Peter van der Meulen

Archive | 2010

Wafer center finding with kalman filter

Christopher C. Kiley; Peter van der Meulen; Forrest T. Buzan; Paul E. Fogel

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Collaboration

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Christopher C. Kiley

Brooks Automation

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Paul E. Fogel

Brooks Automation

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Patrick D. Pannese

Brooks Automation

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Forrest T. Buzan

Brooks Automation

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Forest Buzan

Brooks Automation

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Raymond S. Ritter

Brooks Automation

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Ruth Ann Hendrickson

Brooks Automation

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Thomas A. Schaefer

Brooks Automation

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Vinaya Kavathekar

Brooks Automation

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