Phil Yong Oh

Measurement of excited Xe atoms density in alternating current plasma display panel by means of laser absorption spectroscopy

The exited Xe atoms in the 1s/sub 5/ metastable state and the 1s/sub 4/ resonance state across the two sustaining electrode have been monitored in a micro-discharge cell of alternating current plasma display panels (PDPs) by laser absorption spectroscopy. In this study, it is found that the maximum excited xenon density is 5.4/spl times/10/sup 12/ cm/sup -3/ in the 1s/sub 5/ metastable state and 1.2/spl times/10/sup 12/ cm/sup -3/ in the 1s/sub 4/ resonance state for the PDP cell with gap distance of 150/spl mu/m and width of 350/spl mu/m under the fixed gas pressure of 350 torr and a mixture of Xe content ratio of 10% with Ne under driving frequency of 35 kHz. It is also observed that the exited Xe atom density and the plasma ion density are strongly correlated with one another in this experiment. It is noted that the plasma ion density reaches a minimum at the center of electrode gap and a maximum of 9.0/spl times/10/sup 11/ cm/sup -3/ in a region located 200 /spl mu/m away from this center under the filling pressure of 350 torr, which corresponds to the strongest discharge in alternating current plasma display panel (ac-PDP). When increasing PDP driving frequency from 35 kHz, 50 kHz up to 100 kHz, it is found that density of excited Xe atom in the 1s/sub 5/ metastable state increase from 6.5/spl times/10/sup 12/ cm/sup -3/ up to 1.39/spl times/10/sup 13/ cm/sup -3/.

Influence of Insulator Length on the Downstream Electron Temperature and Density in the Coaxial Plasma Focus Device

We have generated the Ar plasma in the diode chamber based on the established coaxial electrode type and investigated the emitted visible light for emission spectroscopy. The optical emission spectrum data have been obtained for the focused plasma in the cylindrical diode chamber under the input voltage of 4.5 kV and pressure of 40 mtorr. We observed the nine emission lines of Ar II: 407.3, 410.6, 422.4, 426.8, 427.9, 435.0, 438.1, 444.5, and 488.0 nm. The downstream electron temperature and density have been measured by the Boltzmann plot and Stark broadening, respectively, from the assumption of local thermodynamic equilibrium. The length of the acrylic insulator has been changed to 30, 40, and 45 mm, respectively, which is covered on the inner cathode surface, to investigate the influence of insulator length on the downstream electron temperature and density in this experiment. Our results show that the downstream electron temperature and density of focused plasma are 2.5 eV and 1.6times1016 cm-3, respectively, for the coaxial plasma focus with cylindrical electrodes at the insulator length of 40 mm.

Properties of excited xenon atoms in an alternating current plasma display panel

The properties of excited xenon atoms in the discharge cells of a plasma display panel are investigated by measuring the excited atom density via laser absorption spectroscopy. The density of the excited xenon atoms in the metastable state increases from zero, reaches its peak, and decreases with time in the discharge cells, as expected from a theoretical model. The profile of an excited xenon atom is also studied in terms of the xenon mole fraction. The typical density of excited xenon atoms in a metastable state is on the order of 1013 atoms/cm3.

Spatiotemporal Behavior of Excited Xenon-Atom Density in Accordance With Xenon Mole Fraction to Neon in Alternating-Current Plasma Display Panels by Laser-Absorption Spectroscopy

In this paper, spatiotemporal behavior of the excited Xe-atom density of metastable state was investigated by laser-absorption spectroscopy in alternating-current plasma display panel in accordance with the Xe mole fraction to Ne, which can be connected to the relative luminous efficiency over all spaces in a discharge cell. The various test panels with Xe mole fractions of 4%, 7%, 10%, and 15% to Ne have been used in this paper, in which discharge cell with T-typed indium-tin-oxide electrode and closed-barrier rib has been adopted. In this paper, the density of metastable state for the excited Xe atom is found to increase slowly beyond the Xe mole fraction of 10%. It is also accordingly noted that the luminous efficiency increases slowly beyond the Xe mole fraction of 10%, which is similar to that of the density of the excited Xe atoms in the metastable state in this paper.

Spatiotemporal behavior of excited xenon atom density in the IS 5 metastable state according to new type double X-Y electrodes structure in alternating currentplasma display panel

PDP uses the phosphor luminescence by VUV photons emitted from the excited Xe atoms in discharge plasma. Conventional AC-PDP using the coplanar electrodes structure have several problems as low brightness, luminous efficiency and so on. Currently, many researchers have studied the advanced various structure to improve the efficiency. In order to improve the luminescence characteristics of high-resolution plasma display panels (PDPs).

Corrections to “Influence of Insulator Length on the Downstream Electron Temperature and Density in the Coaxial Plasma Focus Device” [Jan 09 184-189]

In the above titled paper (ibid., vol. 37, no. 1, pp. 184-189, Jan 09), the superscript 6 in (3) is incorrect. The correct equation is presented here.

Spatiotemporal behavior of excited Xe atom density in the 1 s5 metastable state according to the Xe mole fractions in He-Ne-Xe ternary gas mixtures at alternating current plasma display panel(AC-PDP)

Summary form only given. We have measured the excited Xe atom density in the ls5 metastable state in accordance with Xe mole fraction to He and Ne in alternating current plasma display panels by laser absorption spectroscopy. The various test panels with Xe mole fractions of 4, 7, 10 and 15 % to He-Ne have been used in this experiment. The 4 inch test panels with discharge cell of T-typed indium-tin-oxide electrode with closed barrier rib have been used and driven by the same driving conditions in this experiment. It is noted that the correlation between the excited Xe atom density in the ls5 metastable state and the VUV luminous efficiency is in good agreement at xenon mole fraction from 1% to 15% with each other.

Design and realisation of apparatus to study capillary discharge in gas

Summary form only given. We have generated Xe plasma in dense plasma focus device of coaxial electrode for extreme ultraviolet lithography (EUVL) and investigated an emitted visible light for electro-optical plasma diagnostics. We have applied an input voltage 4.5 kV to the capacitor bank and the diode chamber have been filled with Xe gas of pressure 40 mTorr. The inner surface of cylindrical cathode have been attatched by an acrylic insulator. The electron temperature and density of the coaxial plasma focus were obtained by the optical emission spectroscopy (OES). The electron temperature has been measured by the two relative line intensity and Boltzmann plot. In case of electron density, it has been observed by the Stark broadening method. This experiment shows that the electron temperature and density characteristics for a focused plasma can be influenced by the acrylic insulator length installed onto the cathode surface and materials of anode. The EUV emission signal whose wavelength is about 6-16 nm has been detected by using a photo-detector (AXUV-100 Zr/C, IRD).

P-132: Influence of Closed Barrier Ribs on the Excited Xe Atom's Density and its Spatiotemporal Behavior in the Alternating Current Plasma Display Panel

The spatiotemporal behavior of the excited Xe atoms density in the 1s5 metastable state has been investigated by the laser absorption spectroscopy in the alternating current plasma display panel with stripe and closed barrier ribs, respectively. The maximum excited Xe atoms densities for the closed and stripe barrier ribs are 1.45 × 1013 cm−3 and 1.28 × 1013 cm−3, respectively. The density and relative VUV efficiency over all spaces for the closed rib in not only higher but also its spatiotemporal behavior in more uniform than those for stripe one.

Spatiotemporal distribution of excited Xe density and electron temperature in alternating current plasma display panel by laser absorption and emission spectroscopy

Summary form only given. We have investigated the spatiotemporal behavior excited Xe atoms density in the 1s5 metastable states by laser absorption spectroscopy and electron temperature by emission spectroscopy, respectively, in accordance with various barrier ribs and xenon contents. The maximum density of excited Xe atoms in the 1s5 in discharge cell with stripe type and closed type barrier rib have been measured to be 1.28 x 1013 cm-3 and 1.45 x 1013 cm-3, respectively. In this experiment, the maximum value of excited Xe atoms density is not different much in different ribs. However, the distribution with spatiotemporal behavior is more uniform in the closed type barrier rib than stripe type rib. Throughout this experiment, we could understand influence of barrier rib and xenon contents on the excited xenon density and electron temperature in micro discharge cell.