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MOEMS-MEMS 2007 Micro and Nanofabrication | 2007

The iMoD display: considerations and challenges in fabricating MOEMS on large area glass substrates

Clarence Chui; Philip D. Floyd; David Heald; Brian W. Arbuckle; Alan Lewis; Manish Kothari; Bill Cummings; Lauren Palmateer; Jan Bos; Daniel Chang; Jedi Chiang; Li-Ming Wang; Edmon Pao; Fritz Y F Su; Vincent Huang; Wen-Jian Lin; Wen-Chung Tang; Jia-Jiun Yeh; Chen-Chun Chan; Fang-Ann Shu; Yuh-Diing Ju

QUALCOMM has developed and transferred to manufacturing iMoD displays, a MEMS-based reflective display technology. The iMoD array architecture allows for development at wafer scale, yet easily scales up to enable fabrication on flat-panel display (FPD) lines. In this paper, we will describe the device operation, process flow and fabrication, technology transfer issues, and display performance.


SID Symposium Digest of Technical Papers | 2006

71.2: Distinguished Paper: iMoD™ Display Manufacturing

Philip D. Floyd; David Heald; Brian W. Arbuckle; Alan Lewis; Manish Kothari; Brian J. Gally; Bill Cummings; Bangalore R. Natarajan; Lauren Palmateer; Jan Bos; Daniel Chang; Jedi Chiang; Denny Chu; Li-Ming Wang; Edmon Pao; Fritz Y F Su; Vincent Huang; Wen-Jian Lin; Wen-Chung Tang; Jia-Jiun Yeh; Chen-Chun Chan; Fang-Ann Shu; Yuh-Diing Ju

QUALCOMM has developed and transferred to manufacturing iMoD Displays, a MEMS-based reflective display technology. The iMoD array architecture allows for development at wafer scale, yet easily scales-up to enable fabrication on flat-panel display (FPD) lines. In this paper, we will describe the device operation, process flow and fabrication, technology transfer issues, and display performance.


Archive | 2009

Optical interference display panel and manufacturing method thereof

Wen-Jian Lin; Brian W. Arbuckle; Brian J. Gally; Philip D. Floyd; Lauren Palmateer


Archive | 2009

APPARATUS AND METHOD FOR REDUCING SLIPPAGE BETWEEN STRUCTURES IN AN INTERFEROMETRIC MODULATOR

Ming-Hau Tung; Brian W. Arbuckle; Philip D. Floyd; Williams J. Cummings


Archive | 2010

Selectable capacitance circuit

Philip D. Floyd


Archive | 2005

Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator

Philip D. Floyd


Archive | 2005

Method and device for electrically programmable display

Philip D. Floyd


Archive | 2007

Mems structures, methods of fabricating mems components on separate substrates and assembly of same

Jeffrey B. Sampsell; Brian J. Gally; Philip D. Floyd


Archive | 2005

Methods of fabricating interferometric modulators by selectively removing a material

Ming-Hau Tung; Philip D. Floyd; Brian W. Arbuckle


Archive | 2011

Systems and methods to present multiple frames on a touch screen

Yair Karmi; Philip D. Floyd; Eric Worthington

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