Is this you? Create Your Porfile
Avatar

Primig Robert

Siemens

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Primig Robert is active.

Explore More

Publication

Featured researches published by Primig Robert.

Archive | 2009

Mikromechanikstruktur für integrierte Sensoranordnungen und Verfahren zur Herstellung einer Mikromechanikstruktur

Rainer Dr; Kolb Stefan; Pitzer Dana; Primig Robert; Schreiter Matthias; Winkler Bernhard

Archive | 1986

Process for producing layer structures composed of polycrystalline silicon, in particular for emitter terminal regions in integrated semiconductor circuits

Voit Helmut; Primig Robert

Archive | 1981

Removing silicon and boron (halogenated) hydride and halide from gas - esp. vacuum pump exhaust gas in semiconductor mfr., by alkaline hydrolysis

Primig Robert; Schaefer Helwig Dipl Chem Dr R

Archive | 2000

Microelectronic structure, especially the bottom electrode of a ferroelectric memory storage capacitor, has a sputtered oxygen-containing iridium layer between a silicon-containing layer and an oxygen barrier layer

Nagel Nicolas; Primig Robert; Kasko Igor; Bruchhaus Rainer

Archive | 1999

IC capacitor having tantalum nitride barrier layer containing a transition metal and/or a lanthanide

Bruchhaus Rainer Dr; Nagel Nicolas; Primig Robert; Schindler Guenther Dr

Archive | 1998

Herstellverfahren für eine hoch-epsilon-dielektrische oder ferroelektrische Schicht und Verwendung des Verfahrens

Schindler Guenther Dr; Hartner Walter Dipl Phys; Bruchhaus Rainer Dr; Primig Robert

Archive | 2002

Ferroelektrischer Kondensator, Verfahren zur Herstellung und Verwendung des Kondensators

Bruchhaus Rainer; Pitzer Dana; Primig Robert; Schreiter Matthias

Archive | 1999

Capacitor in an integrated circuit

Bruchhaus Rainer; Nagel Nicolas; Primig Robert; Schindler Guenther

Archive | 2006

Bauelement für Sensoren mit intergrierter Elektronik und Verfahren zu seiner Herstellung, sowie Sensor mit intergrierter Elektronik

Bruchhaus Rainer Dr; Kolb Stefan; Pitzer Dana; Primig Robert; Schreiter Matthias; Winkler Bernhard

Archive | 2003

HERSTELLVERFAHREN FÜR EINE HOCH-EPSILON-DIELEKTRISCHE ODER FERROELEKTRISCHE SCHICHT

Hartner Walter; Schindler Guenther; Bruchhaus Rainer; Primig Robert

Explore More

Collaboration

Dive into the Primig Robert's collaboration.

Top Co-Authors
Avatar

Bruchhaus Rainer

Siemens

View shared research outputs
Top Co-Authors
Avatar

Pitzer Dana

Siemens

View shared research outputs
Top Co-Authors
Avatar

Bruchhaus Rainer Dr

Siemens

View shared research outputs
Top Co-Authors
Avatar

Nagel Nicolas

Siemens

View shared research outputs
Top Co-Authors
Avatar

Schindler Guenther Dr

Siemens

View shared research outputs
Top Co-Authors
Avatar

Schreiter Matthias

Siemens

View shared research outputs
Top Co-Authors
Avatar

Hartner Walter

Infineon Technologies

View shared research outputs
Top Co-Authors
Avatar

Kolb Stefan

Infineon Technologies

View shared research outputs
Top Co-Authors
Avatar

Schindler Guenther

Infineon Technologies

View shared research outputs
Top Co-Authors
Avatar

Wersing Wolfram

Infineon Technologies

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge