Qiongfeng Shi

MEMS Based Broadband Piezoelectric Ultrasonic Energy Harvester (PUEH) for Enabling Self-Powered Implantable Biomedical Devices

Acoustic energy transfer is a promising energy harvesting technology candidate for implantable biomedical devices. However, it does not show competitive strength for enabling self-powered implantable biomedical devices due to two issues – large size of bulk piezoelectric ultrasound transducers and output power fluctuation with transferred distance due to standing wave. Here we report a microelectromechanical systems (MEMS) based broadband piezoelectric ultrasonic energy harvester (PUEH) to enable self-powered implantable biomedical devices. The PUEH is a microfabricated lead zirconate titanate (PZT) diaphragm array and has wide operation bandwidth. By adjusting frequency of the input ultrasound wave within the operation bandwidth, standing wave effect can be minimized for any given distances. For example, at 1 cm distance, power density can be increased from 0.59 μW/cm2 to 3.75 μW/cm2 at input ultrasound intensity of 1 mW/cm2 when frequency changes from 250 to 240 kHz. Due to the difference of human body and manual surgical process, distance fluctuation for implantable biomedical devices is unavoidable and it strongly affects the coupling efficiency. This issue can be overcome by performing frequency adjustment of the PUEH. The proposed PUEH shows great potential to be integrated on an implanted biomedical device chip as power source for various applications.

Broadband Energy Harvester Using Non-linear Polymer Spring and Electromagnetic/Triboelectric Hybrid Mechanism

Over the years, several approaches have been devised to widen the operating bandwidth, but most of them can only be triggered at high accelerations. In this work, we investigate a broadband energy harvester based on combination of non-linear stiffening effect and multimodal energy harvesting to obtain high bandwidth over wide range of accelerations (0.1 g–2.0 g). In order to achieve broadband behavior, a polymer based spring exhibiting multimodal energy harvesting is used. Besides, non-linear stiffening effect is introduced by using mechanical stoppers. At low accelerations (<0.5 g), the nearby mode frequencies of polymer spring contribute to broadening characteristics, while proof mass engages with mechanical stoppers to introduce broadening by non-linear stiffening at higher accelerations. The electromagnetic mechanism is employed in this design to enhance its output at low accelerations when triboelectric output is negligible. Our device displays bandwidth of 40 Hz even at low acceleration of 0.1 g and it is increased up to 68 Hz at 2 g. When non-linear stiffening is used along with multimodal energy-harvesting, the obtained bandwidth increases from 23 Hz to 68 Hz with percentage increment of 295% at 1.8 g. Further, we have demonstrated the triboelectric output measured as acceleration sensing signals in terms of voltage and current sensitivity of 4.7 Vg−1 and 19.7 nAg−1, respectively.

Investigation of geometric design in piezoelectric microelectromechanical systems diaphragms for ultrasonic energy harvesting

Acoustic energy transfer (AET) has been widely used for contactless energy delivery to implantable devices. However, most of the energy harvesters (ultrasonic receivers) for AET are macro-scale transducers with large volume and limited operation bandwidth. Here, we propose and investigate two microelectromechanical systems diaphragm based piezoelectric ultrasonic energy harvesters (PUEHs) as an alternative for AET. The proposed PUEHs consist of micro-scale diaphragm array with different geometric parameter design. Diaphragms in PUEH-1 have large length to width ratio to achieve broadband property, while its energy harvesting performance is compromised. Diaphragms in PUEH-2 have smaller length to width ratio and thinner thickness to achieve both broadband property and good energy harvesting performance. Both PUEHs have miniaturized size and wide operation bandwidth that are ideally suitable to be integrated as power source for implantable biomedical devices. PUEH-1 has a merged −6 dB bandwidth of 74.5% wit...

Self-Powered Dual-Mode Amenity Sensor Based on the Water–Air Triboelectric Nanogenerator

A water-air triboelectric nanogenerator (WATENG) is presented for CO2 sensing application. During the operation of WATENG, two independent charge transfers can be used to characterize the effect of force and humidity, respectively. Thus, the structure of WATENG provides a capability to eliminate these two major interferences in a triboelectric self-powered sensor. With the aid of the polyethylenimine (PEI) coating, WATENG can be used for CO2 sensing in both static and dynamic conditions. In static condition with a stable CO2 concentration, the CO2 sensing is characterized with respect to different relative humidity, and the sensing range can be up to 6000 ppm. In dynamic CO2 sensing of a pulse gas spray, due to the fast recovery of PEI surface reaction, the sensing range of dynamic situation can be broadened to 30,000 ppm. The self-powered and portable feature of WATENG is preferable as a self-powered amenity sensor for the construction of internet of the things (IoT) sensor networks in the future.

A Self-Powered Six-Axis Tactile Sensor by Using Triboelectric Mechanism

Triboelectric nanogenerators (TENGs) are highly promising because they can scavenge energy from their working environment to sustainably power wearable/mobile electronics. In this work, we propose a novel and straightforward strategy for six-axis force detection and object controlling by using a self-powered sensor based on TENG. The self-powered sensor can be used in diversified tactile sensing and energy saving applications, which has been demonstrated to be able to detect normal force in the range of 0–18 N. Using the vector properties of external force, six-axis directions in three-dimensional (3D) space is detected. Additionally, it is fabricated with environmental friendly materials, i.e., galinstan and polydimethylsiloxane (PDMS), promoting its applications in more diversified situations. Because of the available and high output voltage as well as the low internal impedance, the self-powered sensor is readily compatible with commercial signal processing and management circuits. The device presented in this work shows robust structure and stable output performance, enabling itself as an ideal human machine interface in self-powered, batteryless, and electric energy saving applications.

Development of a Thermoelectric and Electromagnetic Hybrid Energy Harvester from Water Flow in an Irrigation System

A hybrid energy harvester is presented in this paper to harvest energy from water flow motion and temperature difference in an irrigating pipe at the same time. The harvester is based on the integration of thermoelectric and electromagnetic mechanisms. To harvest the water flow motion, a turbine fan with magnets that are attached on the blades is placed inside of the water pipe. Multiple coils turn the water flow energy into electricity with the rotation of the turbine. The thermoelectric generators (TEGs) are attached around the pipe, so as to harvest energy due to temperature difference. For a maximum temperature difference of 55 °C (hot side 80 °C and room temperature 25 °C), twelve serial-connected TEGs can generate voltage up to 0.346 V. Under a load resistance of 20 Ώ, the power output of 1.264 mW can be achieved. For a maximum water flow rate of 49.9 L/min, the electromagnetic generator (EMG) can produce an open circuit voltage of 0.911 V. The EMG can be potentially used as a water flow meter due to the linear relationship between water flow rate and output voltage. Under the joint action of TEG and EMG, the maximum terminal voltage for TEG is 66 mV and for EMG is 241 mV at load resistances of 10 and 100 Ώ, respectively, resulting in a corresponding power output of 0.435 and 0.584 mW.

MEMS based piezoelectric ultrasonic energy harvester for self-powered under-water applications

Acoustic energy transfer (AET) has been widely used in self-powered under-water or implantable biomedical systems. But most of the receivers in AET for energy harvesting are bulk lead zirconate titanante (PZT) transducers. The large volume and limited bandwidth greatly hinder the integration and energy harvesting capability of the bulk receivers. Therefore, in this paper we propose a new microelectromechanical system (MEMS) based piezoelectric ultrasonic energy harvester (PUEH) with miniaturized size and large bandwidth to replace the receiver in AET. The PUEH is ideally suitable for integration with self-powered system since it is fabricated from miniaturized PZT diaphragm array. Due to the large length/width aspect ratio design of the thin PZT diaphragm, several resonant modes can be excited within a narrow frequency range. When the PUEH operates in water medium, excited resonant modes tend to merge together, leading to a broadband behavior of the PUEH. The proposed PUEH has a -6 dB bandwidth of 74.5% with a central frequency of 350 kHz. The PUEH has the ability to harvest energy from a large frequency range from 220 kHz to 930 kHz.

Investigation of Position Sensing and Energy Harvesting of a Flexible Triboelectric Touch Pad

Triboelectric nanogenerator (TENG) is a promising technology because it can harvest energy from the environment to enable self-sustainable mobile and wearable electronic devices. In this work, we present a flexible touch pad capable of detecting the contact location of an object and generating substantial energy simultaneously based on the coupling of triboelectric effects and electrostatic induction. The touch pad consists of Polytetrafluoroethylene (PTFE) thin film, multiple Aluminum (Al) electrodes and Polyethylene terephthalate (PET) layers, which can be achieved through low cost, simplified and scalable fabrication process. Different from the conventional multi-pixel-based positioning sensor (i.e., large array of sensing elements and electrodes), the analogue method proposed here is used to implement the positioning function with only four electrodes. Position location can achieve a detecting resolution of as small as 1.3 mm (the size of locating layer is 7.5 cm × 7.5 cm). For the energy harvesting part, a multilayer structure is designed to provide higher current output. The open circuit voltage of the device is around 420 V and the short circuit current can reach up to 6.26 µA with current density of 0.25 µA/cm2. The maximum output power obtained is approximately 10 mW, which is 0.4 mW/cm2. The flexibility and significantly reduced number of electrodes enable the proposed touch pad to be readily integrated into portable electronic devices, such as intelligent robots, laptops, healthcare devices, and environmental surveys, etc.

Self-Powered Triboelectric Inertial Sensor Ball for IoT and Wearable Applications

Motion monitoring can provide useful information for rehabilitation or diagnostics purpose. Recently, triboelectric nanogenerator (TENG) has developed rapidly as a promising technology for energy harvesting and self-powered sensing. However, research effort of using TENG for multi-axis acceleration sensing is very limited. What is more, rotation sensing has not been achieved by TENG to date. Here we propose a 3-dimensional (3D) symmetric triboelectric nanogenerator based inertial sensor ball (TENG-Ball) for self-powered multi-axis acceleration and rotation sensing. The TENG-Ball has great potential in motion monitoring, internet-of-things (IoT) and wearable applications.

Controlling Surface Charge Generated by Contact Electrification: Strategies and Applications

Contact electrification is the phenomenon in which charge is generated on the surfaces of materials after they come into contact. The surface charge generated has traditionally been known to cause a vast range of undesirable consequences in our lives and in industry; on the other hand, it can also give rise to many types of useful applications. In addition, there has been a lot of interest in recent years for fabricating devices and materials based on regulating a desired amount of surface charge. It is thus important to understand the general strategies for increasing, decreasing, or controlling the surface charge generated by contact electrification. Herein, the fundamental mechanisms for influencing the amount of charge generated, the methods used for implementing these mechanisms, and some of the recent interesting applications that require regulating the amount of surface charge generated by contact electrification, are briefly summarized.