R. K. Gupta

Quantitative determination of higher harmonic content in the soft x-ray spectra of toroidal grating monochromator using a reflection multilayer.

Use of a grating monochromator causes a problem of higher harmonic contaminations in a synchrotron beamline operating in the soft x ray/vacuum ultraviolet region. Generally gratings are used to experimentally determine the higher harmonic contaminations. In this method, the relative contribution of contaminant wavelengths is measured with respect to the first harmonic wavelength (desired wavelength). The quantitative fit of grating spectra is rather complex, and therefore qualitative analysis is carried out. Analysis of multilayer reflectivity data has become rather simple with recent advances in the theoretical modeling. Therefore we propose to use a multilayer mirror and analyze its reflectivity data for quantitative determination of harmonic contamination in a soft x ray beamline. In the present study we used a Mo/Si multilayer of d=97  Å to quantify the spectral purity of 600  lines/mm toroidal grating at the reflectivity beamline of Indus-1 450 MeV synchrotron source. The measured reflectivity spectra at each wavelength is analyzed and the actual contribution of higher harmonics in the incident beam is obtained. Details of methodology and results are discussed.

Analysis of soft x-ray/VUV transmission characteristics of Si and Al filters

Ultrathin filters of Al (1500A) and Si (1200A) should exhibit more than 65% transmission above their Labsorption edges in the soft x-ray/vacuum ultra violet region(Si L-edge: 124 A and Al L-edge: 170 A). However, the measured transmission characteristics of these filters showed ∼40% transmission. The transmission measurements of these filters were carried at the reflectivity beamline of Indus-1 synchrotron source out over a large wavelength range of 120-360A. In order to understand the measured transmission performance a detailed model fitting is performed using the Paratt formalism. It is found that the oxidation of the surface region of the filters is responsible for the reduced transmission performance. Effects of higher harmonics of the toroidal grating monochromator are also considered in the data analysis.

Fine structures in refractive index of sapphire at the L II,III absorption edge of aluminum determined by soft x-ray resonant reflectivity

The optical constants of sapphire crystal (α-Al(2)O(3)) and amorphous Al(2)O(3) in the soft x-ray region (67-85 eV) around the aluminum LII,III absorption edge (73.1 eV) are determined by angle-dependent x-ray reflectivity. The differences between the optical constant values of both the samples are discussed. The fine structures obtained in the absorption of crystalline sapphire are explained. An absorption feature at 70.2 eV is observed for the first time for crystalline alumina. Both datasets are compared to the tabulated values of Henke et al. [At. Data Nucl. Data Tables 54, 181 (1993)], Weaver et al. [Physik Daten, Physics Data: Optical Properties of Metals (Fach-information zentrum, 1981), Vols. 18-1 and 18-2], and [Handbook of Optical Constants of Solids II (Academic, 1991)].

Structural variation in a synchrotron-induced contamination layer (a-C:H) deposited on a toroidal Au mirror surface

A carbon layer deposited on an optical component is the result of complex interactions between the optical surface, adsorbed hydrocarbons, photons and secondary electrons (photoelectrons generated on the surface of optical elements). In the present study a synchrotron-induced contamination layer on a 340 mm × 60 mm Au-coated toroidal mirror has been characterized. The contamination layer showed a strong variation in structural properties from the centre of the mirror to the edge region (along the long dimension of the mirror) due to the Gaussian distribution of the incident photon beam intensity/power on the mirror surface. Raman scattering measurements were carried out at 12 equidistant (25 mm) locations along the length of the mirror. The surface contamination layer that formed on the Au surface was observed to be hydrogenated amorphous carbon film in nature. The effects of the synchrotron beam intensity/power distribution on the structural properties of the contamination layer are discussed. The I(D)/I(G) ratio, cluster size and disordering were found to increase whereas the sp2:sp3 ratio, G peak position and H content decreased with photon dose. The structural parameters of the contamination layer in the central region were estimated (thickness ≃ 400 Å, roughness ≃ 60 Å, density ≃ 72% of bulk graphitic carbon density) by soft X-ray reflectivity measurements. The amorphous nature of the layer in the central region was observed by grazing-incidence X-ray diffraction.

Optical constants of e-beam-deposited zirconium dioxide measured in the 55–150 Å wavelength region using the reflectivity technique

In the present study, optical constants of e-beam-deposited zirconium dioxide (ZrO2) thin film are determined in the 55-150 Å soft x-ray wavelength region using the angle-dependent reflectivity technique. Soft x-ray reflectivity measurements are carried out using the reflectivity beamline at the Indus-1 synchrotron radiation source. Derived optical constants (δ and β) are compared with the tabulated values of Henke et al. [http://henke.lbl.gov/optical_constants/asf.html]. It is found that the measured δ values are consistently lower than the tabulated bulk values in the 70-150 Å wavelength region. In this region, the delta values are lower by 19%-24% from the tabulated data. Below the Zr M4 edge (66.3 Å), a deviation in delta values is found as ∼2%-21%. These changes are attributed to growth-related defects (oxygen and voids) and variation in film stoichiometry. To the best of our knowledge, the present study gives the first reported experimental values of optical constants for ZrO2 in the 55-150 Å wavelength region.

Analysis of higher harmonic contamination with a modified approach using a grating analyser.

Soft x-ray spectra of the toroidal grating monochromator (TGM) at the reflectivity beamline of Indus-1 synchrotron source are analyzed for higher harmonic contribution. A diffraction grating of central line spacing 1200 l/mm is used to disperse the monochromatic beam received from TGM to quantify the harmonic contents in the 50-360 Å wavelength range. In order to calculate the harmonic contamination, conventionally the intensity of higher order peak is divided by first order peak intensity of the desired wavelength. This approach is found to give wrong estimate as first order peak itself is overlapped by higher order peaks. In the present study, a modified approach has been proposed to calculate harmonic contamination where the intensity contributions of overlapping orders have been removed from the first order diffraction peak of the desired wavelength. It is found that the order contamination in the TGM spectra is less than 15% in the wavelength range of 90-180 Å. The total harmonic contribution increases from 6%-60% in the wavelength range of 150-260 Å. The critical wavelength of Indus-1 is 61 Å hence the harmonic contamination below 90 Å is significantly low. The results obtained with modified approach match well with those obtained by quantitative analysis of multilayer reflectivity data. The obtained higher harmonics data are used to fit the transmission of aluminum edge filter in the 120-360 Å wavelength range.

Restoration of absolute diffraction efficiency and blaze angle of carbon contaminated gratings by ultraviolet cleaning

An UV cleaning technique has been used for the removal of carbon contamination from grating surface, using oxygen free-radicals generated by the absorption of UV radiation (172 nm) in atmospheric oxygen. The extent of restoration of absolute diffraction efficiency (ADE) and grating blaze angle of a carbon-contaminated variable line-spaced concave grating (average line spacing of 1200 lines/mm, blaze angle 3.2 deg, and blaze wavelength 10 nm) has been studied over a 5-70 nm wavelength range. The contamination (due to prolonged use in extreme-ultraviolet spectrograph) resulted in a drastic reduction in the diffraction efficiency of grating, along with a change in the blaze angle. The UV cleaning led to the restoration of blaze angle as well as to an increase in the ADE by more than an order of magnitude for the first two diffraction orders (i.e., from ~0.2 to ~7.2%) for the first diffraction order and 0.1 to ~5% for the second diffraction order at the blaze wavelength. The study is useful for the restoration of carbon-contaminated costly optics.

Influence of the core-hole effect on optical properties of magnesium oxide (MgO) near the Mg L-edge region

The influence of the core-hole effect on optical properties of magnesium oxide (MgO) is established through experimental determination of optical constants and first-principles density functional theory studies. Optical constants (δ and β) of MgO thin film are measured in the spectral region 40-300 eV using reflectance spectroscopy techniques at the Indus-1 synchrotron radiation source. The obtained optical constants show strong core exciton features near the Mg L-edge region, causing significant mismatch with Henkes tabulated values. On comparing the experimentally obtained optical constants with Henkes tabulated values, an edge shift of ∼3.0 eV is also observed. Distinct evidence of effects of core exciton on optical constants (δ and β) in the near Mg L-edge absorption spectra are confirmed through first-principles simulations.

Study on higher harmonic suppression using edge filter and polished Si wafer

Higher harmonics contamination is a severe problem in synchrotron beamlines where grating monochromators are used. In these beamlines, absorption edge filters and critical angle mirrors are used to suppress the harmonic contaminations. In the present study, carried out using Indus-1 reflectivity beamline, a harmonic suppression characteristic of Al edge filter and polished silicon wafer are determined. It is found that the Al filter suppresses higher harmonics in 2–7% range whereas the polished silicon wafer can suppress the higher harmonics below 1%. The results of comparative study are discussed.

Analysis of order contamination from toroidal grating monochromator of Indus-1 reflectivity beamline

The synchrotron radiation spectra of toroidal grating monochromators (TGM) often contaminated by significant amounts of higher orders. Quantitative estimation of order contamination is essential in order to perform quantitative spectroscopy measurements. At Indus-1 reflectivity beamline higher order contaminations from TGM monochromator are experimentally determined using a reflection grating analyzer. It is found that the order contamination in wavelength range of 50-200 A is less than 15%. Use of edge filters reduces the order contamination level below 5% in this wavelength range.