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R. Scot Clark

Air Liquide

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Publication

Featured researches published by R. Scot Clark.

Archive | 1996

System and method for on-site mixing of ultra-high-purity chemicals for semiconductor processing

Joe G. Hoffman; R. Scot Clark; Allen H. Jones

Archive | 1992

Manufacture of high precision electronic components with ultra-high purity liquids

R. Scot Clark; Stephen Baird; Joe G. Hoffman

Archive | 1998

Point-of-use ammonia purification for electronic component manufacture

Joe G. Hoffman; R. Scot Clark

Archive | 1996

On-site manufacture of ultra-high-purity hydrofluoric acid for semiconductor processing

Joe G. Hoffman; R. Scot Clark

Archive | 1986

Method and apparatus for the continuous on-site chemical reprocessing of ultrapure liquids

R. Scot Clark; Joe G. Hoffman; John B. Davison; Alan W. Jones; Allen H. Jones; David W. Persichini; Wallace I. Yuan; Bruce A. Lipisko

Archive | 1988

Method and apparatus for the continuous on-site chemical reprocessing of ultrapure liquids used in semiconductor wafer cleaning

R. Scot Clark; Joe G. Hoffman; John B. Davison; Alan W. Jones; Allen H. Jones; David W. Persichini; Wallace I. Yuan; Bruce A. Lipisko

Archive | 1990

Method for making ultrapure sulfuric acid

R. Scot Clark; John B. Davison; David W. Persichini; Wallace I. Yuan; Bruce A. Lipisko; Alan W. Jones; Allen H. Jones; Joe G. Hoffman

Archive | 1989

Apparatus for the continuous on-site chemical reprocessing of ultrapure liquids

R. Scot Clark; Joe G. Hoffman; John B. Davison; David W. Persichini; Wallace I. Yuan; Bruce A. Lipisko; Alan H. Jones; Alan W. Jones

Archive | 1997

On-site generation of ultra-high-purity buffered-HF and ammonium fluoride

Joe G. Hoffman; R. Scot Clark

Archive | 1996

On-site manufacture of ultra-high-purity nitric acid for semiconductor processing

Joe G. Hoffman; R. Scot Clark; Wallace I. Yuan

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Joe G. Hoffman

Air Liquide

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Wallace I. Yuan

Air Liquide

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Allen H. Jones

Air Liquide

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Hwa-Chi Wang

Air Liquide

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Mindi Xu

Air Liquide

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Stephen Baird

Air Liquide

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Tracey Jacksier

Air Liquide

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