Ralf Herkelmann

Handling and security in the sythesis and purification of nitrogen trifluoride

Abstract Meanwhile nitrogen trifluoride is a commercially available product. It is used e.g. as a dry etching agent for semiconductors, as a fluorine source in high energy lasers or as in situ cleaning of chemical vapor deposition equipment. For all applications a more or less high purity of the nitrogen trifluoride is required. Apart from the problems with the synthesis there are many complications regarding the purification and handling of nitrogen trifluoride. A review of problems concerning the synthesis and purification of nitrogen trifluoride will be given.