Randall S. Geels

Method and apparatus for high-speed thickness mapping of patterned thin films

Rapid and accurate end point detection in a noisy environment

Determining wafer orientation in spectral imaging

Spectrometer configured to provide simultaneous multiple intensity spectra from independent light sources

Whole-substrate spectral imaging system for CMP

Spectral imaging of substrates

Thin-film metrology using spectral reflectance with an intermediate in-line reference

CORRECTION OF SECOND-ORDER DIFFRACTION EFFECTS IN FIBER-OPTIC-BASED SPECTROMETERS

OPTICAL SPECTROMETER CONFIGURATION INCLUDING SPATIALLY VARIABLE FILTER (SVF)

Procede et appareil de cartographie d'epaisseur a grande vitesse pour couches minces configurees