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Dive into the research topics where Regina Martin is active.

Publication


Featured researches published by Regina Martin.


Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies | 2003

Laser induced fluorescence of calcium fluoride upon 193 nm and 157 nm excitation

Christian Muehlig; Wolfgang Triebel; Gabriela Toepfer; Joachim Bergmann; Sven Brueckner; Christoph Chojetzki; Regina Martin

The combination of in situ transmission and laser induced fluorescence (LIF) measurements of CaF2 at 193 nm and 157 nm laser irradiation reveals a correlation between selected fluorescence bands and the laser transmission. At 193 nm irradiation, the fluence dependent transmission |dT/dH| of calcium fluoride shows a significant dependence on the temporal pulse shape of the laser source. Furthermore, a quantitative correlation between transmission properties and fluorescence intensity of calcium fluoride is reported for the first time in case of a LIF band at around 740 nm. Newly defined LIF detection conditions yield a remarkable increase of the sensitivity for bands with short lifetimes. Furthermore, different excitation mechanisms for the investigated fluorescence bands are found from both, fluence and pulse number dependent LIF measurements. At 157 nm irradiation, a fluence dependence of the transmission (|dT/dH|,T0) is obtained which is comparable to that of 193 nm excitation. LIF investigations at 157 nm excitation reveal an increase in complexity of the spectra compared to those of 193 nm excitation. It is found that the LIF spectra at 157 nm excitation mostly consist of the same bands as for 193 nm irradiation. Some samples, however, show a LIF band vanishing relative to its intensity at 193 nm excitation or the appearance of new bands characteristic only for 157 nm excitation. From comparing two calcium fluoride samples at 193 nm and 157 nm irradiation it is assumed that the presence of a characteristic 157 nm excited LIF band at around 225 nm is responsible for a drop in transmission at 157 nm.


Archive | 2006

Manufacturing multi-crystalline silicon comprises placing detachable upper section at an upper edge of crucible furnace to build container structure, filling the container structure with silicon filling, and heating the container structure

Regina Martin; Matthias Müller; Uwe Sahr; Ingo Dr. Schwirtlich


Archive | 2006

Method for producing optical elements for microlithography, lens systems obtainable therewith and their use

Gunther Wehrhan; Regina Martin; Lutz Parthier; Jörg Stäblein; Martin Letz; Jochen Alkemper; Konrad Knapp; Klaus Dr. Petermann


Archive | 2004

Method for quantitative determination of the suitability of crystals for optical components exposed to high energy densities, crystals graded in this way and uses thereof

Christian Muehlig; Wolfgang Triebel; Gabriela Toepfer; Regina Martin


Archive | 2003

Determining the suitability of an optical material for the production of optical elements, corresponding device, and use of said material

Christian Muehlig; Wolfgang Triebel; Jochen Alkemper; Regina Martin


Archive | 2006

Method for making optical elements for microlithography, the lens systems obtained by the method and their uses

Gunther Wehrhan; Regina Martin; Lutz Parthier; Joerg Staeblein; Martin Letz; Jochen Alkemper; Konrad Knapp; Klaus Dr. Petermann


Archive | 2005

Method for specification of optical material with reduced inclination to irreversible radiation damage involving the use of laser and fluorescent energy

Gordon von der Dr. Gönna; Regina Martin; Lutz Parthier; Karin Pöhl


Archive | 2006

Method to produce optical parts for microlithography, associated lens systems and its application uses optical garnets, cubic spinels, cubic perovskites, and cubic M (II) - M (Iv) oxides

Gunther Wehrhan; Regina Martin; Lutz Parthier; Jörg Stäblein


Archive | 2006

Method for determination of irreversible radiation damage of optical materials

Gordon von der Goenna; Karin Poehl; Regina Martin; Lutz Parthier


Archive | 2009

Method of testing optical materials by irradiating with high energy density radiation, optical materials selected by said method and uses thereof

Gordon von der Goenna; Karin Poehl; Regina Martin; Lutz Parthier

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Christian Mühlig

Leibniz Institute of Photonic Technology

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