Reinaldo Mario Machado

The ejector-driven monolith loop reactor — experiments and modeling

Abstract A novel catalytic gas–liquid reactor configuration, consisting of a monolithic reactor with a liquid-motive ejector as gas–liquid distributor is introduced as a retrofit or alternative to an agitated slurry reactor. The ejector distributes gas and liquid to the channels of a monolith reactor at velocities greater than those attainable with gravity-driven flow, intensifying mass transfer and reaction in a compact reactor. Pressure drops measured using this configuration do not conform to models from the literature. A strong effect of liquid coalescence properties was observed. Until fully predictive pressure drop and gas–liquid distribution models become available, successful scale-up will depend on pressure-drop data measured with industrial process conditions and fluids. Current literature models for mass transfer underpredict laboratory autoclave reaction results, indicating a need for further model development, and in the interim requiring pilot-scale testing for scale-up purposes.

Qualification of the GASGUARD® SAS GGT Arsine Sub‐Atmospheric Gas Delivery System for Ion Implantation

A beta level evaluation of the GASGUARD® SAS GGT Arsine ion implant dopant supply developed by Air Products and Chemicals, Inc. was conducted by Atmel Corporation. The evaluation included characterization of the normalized wafer yield, mass spectra, ionization efficiency, flow rate, beam current, extraction of usable material and cylinder lifetime.This new and novel sub‐atmospheric dopant gas delivery system utilizes a unique electrochemical process, which can generate, on demand, high flows of arsine at a constant 400 torr pressure while limiting net inventory of arsine to only 1 gram. This paper illustrates how Atmel Corporation evaluated and released this new arsine dopant delivery system for commercial production and verified high delivery capacity, resulting in reduced gas costs and increased cylinder life compared to the traditional adsorbent based technology.