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Renhe Jia

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Publication

Featured researches published by Renhe Jia.

Archive | 2013

MIXED ABRASIVE POLISHING COMPOSITIONS

Brian Reiss; Jakub Nalaskowski; Viet Lam; Renhe Jia; Jeffrey Dysard

Archive | 2015

Polishing composition containing ceria abrasive

Brian Reiss; Dana Sauter Van Ness; Viet Lam; Alexander Hains; Steven Kraft; Renhe Jia

Archive | 2014

Cmp compositions selective for oxide and nitride with high removal rate and low defectivity

Kevin Dockery; Renhe Jia; Jeffrey Dysard

Archive | 2014

Cmp compositions selective for oxide over polysilicon and nitride with high removal rate and low defectivity

Tina Li; Kevin Dockery; Renhe Jia; Jeffrey Dysard

Archive | 2014

CMP COMPOSITIONS EXHIBITING REDUCED DISHING IN STI WAFER POLISHING

Sudeep Pallikkara Kuttiatoor; Kevin Dockery; Prativa Pandey; Renhe Jia

Archive | 2013

CHEMICAL-MECHANICAL PLANARIZATION OF POLYMER FILMS

Sudeep Pallikkara Kuttiatoor; Renhe Jia; Jeffrey Dysard

Archive | 2017

POLISHING COMPOSITION CONTAINING CATIONIC POLYMER ADDITIVE

Brian Reiss; Dana Sauter Van Ness; Viet Lam; Renhe Jia

Archive | 2017

METHOD OF POLISHING A LOW-K SUBSTRATE

Sudeep Pallikkara Kuttiatoor; Renhe Jia; Kuen-Min Chen; Steven Kraft; Phillip W. Carter

Archive | 2016

POLISHING COMPOSITION CONTAINING CERIA PARTICLES AND METHOD OF USE

Brian Reiss; Viet Lam; Renhe Jia

2015 International Conference on Planarization/CMP Technology (ICPT) | 2015

CMP solutions for 3D-NAND staircase CMP

Tina C. Li; Brian Reiss; Sudeep Pallikkara Kuttiatoor; Viet Lam; Jae-Dong Lee; Renhe Jia

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Collaboration

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