Richard K. Leach

Optical measurement of surface topography

Introduction to surface texture measurement.- Some common terms and definitions.- Limitations of optical 3D sensors.- Calibration of optical surface topography measuring instruments.- Chromatic confocal microscopy.- Point autofocus instruments.- Focus variation instruments.- Phase shifting interferometry.- Coherence scanning interferometry.- Digital holographic microscopy.- Imaging confocal microscopy.- Light scattering methods

Characterisation of areal surface texture

Introduction to surface topography.- The areal field parameters.- The areal feature parameters.- Areal filtering methods.- Areal form removal.- Areal fractal methods.- Choosing the appropriate parameter.- Characterization of individual areal features.- Multi-scale signature of surface topography.- Correlation of areal surface texture parameters to solar cell efficiency.- Characterisation of cylinder liner honing textures for production control.- Characterization of the mechanical bond strength for copper on glass plating applications.- Inspection of laser structured cams and conrods.- Road surfaces.

Surface measurement errors using commercial scanning white light interferometers

This paper examines the performance of commercial scanning white light interferometers in a range of measurement tasks. A step height artefact is used to investigate the response of the instruments at a discontinuity, while gratings with sinusoidal and rectangular profiles are used to investigate the effects of surface gradient and spatial frequency. Results are compared with measurements made with tapping mode atomic force microscopy and discrepancies are discussed with reference to error mechanisms put forward in the published literature. As expected, it is found that most instruments report errors when used in regions close to a discontinuity or those with a surface gradient that is large compared to the acceptance angle of the objective lens. Amongst other findings, however, we report systematic errors that are observed when the surface gradient is considerably smaller. Although these errors are typically less than the mean wavelength, they are significant compared to the vertical resolution of the instrument and indicate that current scanning white light interferometers should be used with some caution if sub-wavelength accuracy is required.

Determination of the transfer function for optical surface topography measuring instruments—a review

A significant number of areal surface topography measuring instruments, largely based on optical techniques, are commercially available. However,implementation of optical instrumentation into production is currently difficult dueto the lack of understanding of the complex interaction between the light and the component surface. Studying the optical transfer function of the instrument can help address this issue. Herea review is given of techniques for the measurement of optical transfer functions. Starting from the basis of a spatially coherent, monochromatic confocal scanning imaging system, the theory of optical transfer functions in three-dimensional (3D) imaging is presented. Further generalizations are reviewed allowing the extension of the theory to the description of conventional and interferometric 3D imaging systems. Polychromatic transfer functions and surface topography measurements are also discussed. Following presentation of theoretical results, experimental methods to measure the optical transfer function of each class of system are presented, with a focus on suitable methods for the establishment of calibration standards in 3D imaging and surface topography measurements.

The European nanometrology landscape

This review paper summarizes the European nanometrology landscape from a technical perspective. Dimensional and chemical nanometrology are discussed first as they underpin many of the developments in other areas of nanometrology. Applications for the measurement of thin film parameters are followed by two of the most widely relevant families of functional properties: measurement of mechanical and electrical properties at the nanoscale. Nanostructured materials and surfaces, which are seen as key materials areas having specific metrology challenges, are covered next. The final section describes biological nanometrology, which is perhaps the most interdisciplinary applications area, and presents unique challenges. Within each area, a review is provided of current status, the capabilities and limitations of current techniques and instruments, and future directions being driven by emerging industrial measurement requirements. Issues of traceability, standardization, national and international programmes, regulation and skills development will be discussed in a future paper.

Bandwidth characteristics and comparisons of surface texture measuring instruments

In this review we will discuss many of the problems that are encountered when designing and carrying out comparisons of surface texture measuring instruments. Previous comparisons are discussed to highlight some of the key issues. The limitations of stylus and optical instruments are identified with a focus on the spatial bandwidths in which they operate. Guidance is given on how to design comparisons to avoid variations in the results that are due to the operating principles and bandwidth limitations of the instruments involved. Methods for matching the bandwidths of different instruments are presented and some examples are given that highlight potential problems. The software aspects of instrument comparisons are also discussed. Finally, some advice is given on how to compare profile and areal surface texture measurements.

Recent advances in traceable nanoscale dimension and force metrology in the UK

It is now fully appreciated that metrology will play an integral role in the successful development and commercialization of micro- and nanotechnology. To this end, the UK Government, through the National Measurement System, funded several groundbreaking projects in its 2002–2005 Programme for Length. This paper will briefly describe the background of the research, concentrating on the technical details of the projects. The Programme for Length normally only funds work into dimensional metrology but this funding cycle also funded work into low force metrology as this area is crucial to most mechanical probing techniques. The projects described include a traceable areal contacting instrument designed to calibrate areal transfer artefacts and hence offer traceability for industrial areal instruments, the production of the areal transfer artefacts, the development of Internet-based softgauges for profile parameters, a primary low force balance with a force resolution of 50 pN and the development of methods for measuring complex micro-scale structures. Amongst others, the projects involved collaboration with PTB, TNO, Taylor Hobson, AWE, Rubert & Co. and the Universities of Warwick, Huddersfield and Eindhoven.

Calibration of the scales of areal surface topography-measuring instruments: part 1. Measurement noise and residual flatness

In this paper, we present methods for determining the measurement noise and residual flatness of areal surface topography-measuring instruments. The methods are compliant with draft international specification standards on areal surface texture. We first introduce the international standards framework and then present current methods based on averaging and subtraction to isolate the measurement noise and residual flatness from the sample surface topography. These methods are relatively difficult to apply and time consuming in practice. An alternative method is presented based on thresholding and filtering techniques. This method is simple to apply in practice. Traceability and measurement uncertainty are discussed.

X-ray computed tomography for additive manufacturing: a review

In this review, the use of x-ray computed tomography (XCT) is examined, identifying the requirement for volumetric dimensional measurements in industrial verification of additively manufactured (AM) parts. The XCT technology and AM processes are summarised, and their historical use is documented. The use of XCT and AM as tools for medical reverse engineering is discussed, and the transition of XCT from a tool used solely for imaging to a vital metrological instrument is documented. The current states of the combined technologies are then examined in detail, separated into porosity measurements and general dimensional measurements. In the conclusions of this review, the limitation of resolution on improvement of porosity measurements and the lack of research regarding the measurement of surface texture are identified as the primary barriers to ongoing adoption of XCT in AM. The limitations of both AM and XCT regarding slow speeds and high costs, when compared to other manufacturing and measurement techniques, are also noted as general barriers to continued adoption of XCT and AM.

Calibration of the scales of areal surface topography measuring instruments: part 2. Amplification, linearity and squareness

Methods for determining the amplification coefficient, linearity and squareness of the axes of areal surface topography measuring instruments are presented. The methods are compliant with draft international specification standards on areal surface texture. A method of calibrating the z-axis scale according to the guidelines given in surface profile specification standards, which is applied to areal measurements, is first presented. Then a method of calibrating the scales of the x and y axes using cross grating artefacts, and which is not based on pitch measurement, is introduced. A method for extending the calibrated range of the z-axis scale, which uses multiple overlapped measurements of a step height artefact, is also discussed.