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Risa Nakase

Tokyo Electron

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Publication

Featured researches published by Risa Nakase.

Archive | 1997

Plasma treating device

Shuichi Ishizuka; Risa Nakase; Takeshi Aoki

Archive | 2001

Plasma film forming method and plasma film forming apparatus

Takashi Akahori; Masaki Tozawa; Yoko Naito; Risa Nakase; Osamu Yokoyama; Shuichi Ishizuka; Shunichi Endo; Masahide Saito; Takeshi Aoki; Tadashi Hirata

Archive | 2001

Processing apparatus and cleaning method

Shinsuke Oka; Osamu Yokoyama; Risa Nakase; Shuuichi Ishizuka

Archive | 2000

Method for forming film by plasma

Risa Nakase; Takeshi Aoki; Akira Suzuki; Yoshihiro Kato

Archive | 1997

Method for cleaning plasma treatment device and plasma treatment system

Takashi Akahori; Masaki Tozawa; Yoko Naito; Risa Nakase; Shuichi Ishizuka; Masahide Saito; Tadashi Hirata

Archive | 2000

Plasma thin-film deposition method

Risa Nakase

Archive | 1997

Method for cleaning plasma treatment device and method for plasma treatment

Takashi Akahori; Masaki Tozawa; Yoko Naito; Risa Nakase; Shuichi Ishizuka; Masahide Saito; Tadashi Hirata

Archive | 1998

METHOD FOR FORMING PLASMA FILMS

Risa Nakase

Archive | 1997

Method of plasma treatment

Takashi Akahori; Risa Nakase; Shinsuke Oka

Archive | 2001

Appareil de traitement et procede de nettoyage

Shinsuke Oka; Osamu Yokoyama; Risa Nakase; Shuuichi Ishizuka

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Collaboration

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Takashi Akahori

Sumitomo Metal Industries

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Shinsuke Oka

Tokyo Electron

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Shuichi Ishizuka

Hiroshima University

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Takeshi Aoki

Tokyo Electron

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Masahide Saito

Tokyo Electron

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Masaki Tozawa

Tokyo Electron

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Tadashi Hirata

Tokyo Electron

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Yoko Naito

Tokyo Electron

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Osamu Yokoyama

Tokyo Electron

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Hideaki Amano

Tokyo Electron

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