Robert A. Barton

Large-Scale Arrays of Single-Layer Graphene Resonators

We fabricated large arrays of suspended, single-layer graphene membrane resonators using chemical vapor deposition (CVD) growth followed by patterning and transfer. We measure the resonators using both optical and electrical actuation and detection techniques. We find that the resonators can be modeled as flat membranes under tension, and that clamping the membranes on all sides improves agreement with our model and reduces the variation in frequency between identical resonators. The resonance frequency is tunable with both electrostatic gate voltage and temperature, and quality factors improve dramatically with cooling, reaching values up to 9000 at 10 K. These measurements show that it is possible to produce large arrays of CVD-grown graphene resonators with reproducible properties and the same excellent electrical and mechanical properties previously reported for exfoliated graphene.

Free-Standing Epitaxial Graphene

We report on a method to produce free-standing graphene sheets from epitaxial graphene on silicon carbide (SiC) substrate. Doubly clamped nanomechanical resonators with lengths up to 20 microm were patterned using this technique and their resonant motion was actuated and detected optically. Resonance frequencies of the order of tens of megahertz were measured for most devices, indicating that the resonators are much stiffer than expected for beams under no tension. Raman spectroscopy suggests that the graphene is not chemically modified during the release of the devices, demonstrating that the technique is a robust means of fabricating large-area suspended graphene structures.

High, Size-Dependent Quality Factor in an Array of Graphene Mechanical Resonators

Graphenes unparalleled strength, stiffness, and low mass per unit area make it an ideal material for nanomechanical resonators, but its relatively low quality factor is an important drawback that has been difficult to overcome. Here, we use a simple procedure to fabricate circular mechanical resonators of various diameters from graphene grown by chemical vapor deposition. In addition to highly reproducible resonance frequencies and mode shapes, we observe a striking improvement of the membrane quality factor with increasing size. At room temperature, we observe quality factors as high as 2400 ± 300 for a resonator 22.5 μm in diameter, about an order of magnitude greater than previously observed quality factors for monolayer graphene. Measurements of quality factor as a function of modal frequency reveal little dependence of Q on frequency. These measurements shed light on the mechanisms behind dissipation in monolayer graphene resonators and demonstrate that the quality factor of graphene resonators relative to their thickness is among the highest of any mechanical resonator demonstrated to date.

Fabrication of a Nanomechanical Mass Sensor Containing a Nanofluidic Channel

Nanomechanical resonators operating in vacuum are capable of detecting and weighing single biomolecules, but their application to the life sciences has been limited by viscous forces that impede their motion in liquid environments. A promising approach to avoid this problem, encapsulating the fluid within a mechanical resonator surrounded by vacuum, has not yet been tried with resonant sensors of mass less than approximately 100 ng, despite predictions that devices with smaller effective mass will have proportionally finer mass resolution. Here, we fabricate and evaluate the performance of doubly clamped beam resonators that contain filled nanofluidic channels and have masses of less than 100 pg. These nanochannel resonators operate at frequencies on the order of 25 MHz and when filled with fluid have quality factors as high as 800, 2 orders of magnitude higher than that of resonators of comparable size and frequency operating in fluid. Fluid density measurements reveal a mass responsivity of 100 Hz/fg and a noise equivalent mass of 2 fg. Our analysis suggests that realistic improvements in the quality factor and frequency stability of nanochannel resonators would render these devices capable of sensing attogram masses from liquid.

Photothermal Self-Oscillation and Laser Cooling of Graphene Optomechanical Systems

By virtue of their low mass and stiffness, atomically thin mechanical resonators are attractive candidates for use in optomechanics. Here, we demonstrate photothermal back-action in a graphene mechanical resonator comprising one end of a Fabry-Perot cavity. As a demonstration of the utility of this effect, we show that a continuous wave laser can be used to cool a graphene vibrational mode or to power a graphene-based tunable frequency oscillator. Owing to graphenes high thermal conductivity and optical absorption, photothermal optomechanics is efficient in graphene and could ultimately enable laser cooling to the quantum ground state or applications such as photonic signal processing.

Fabrication and performance of graphene nanoelectromechanical systems

As a result of the recent progress in fabricating large-area graphene sheets, graphene-based mechanical devices have become vastly easier to manufacture and now show even greater promise for a range of applications. This article reviews the progress of resonant graphene nanoelectromechanical systems and the possible applications of this technology to signal processing, sensing, and other areas. After discussing recent advances in fabrication and measurement techniques that make graphene resonators a viable technology, the article presents what is known about the performance of graphene mechanical systems. The authors also highlight unresolved questions, such as the source of the dissipation in graphene resonators, and discuss the progress made on these issues to date. The authors conclude with a discussion of important future directions for graphene research and the applications for which graphene nanomechanical devices may be well suited.

Low-Voltage Organic Electronics Based on a Gate-Tunable Injection Barrier in Vertical graphene-organic Semiconductor Heterostructures

The vertical integration of graphene with inorganic semiconductors, oxide semiconductors, and newly emerging layered materials has recently been demonstrated as a promising route toward novel electronic and optoelectronic devices. Here, we report organic thin film transistors based on vertical heterojunctions of graphene and organic semiconductors. In these thin heterostructure devices, current modulation is accomplished by tuning of the injection barriers at the semiconductor/graphene interface with the application of a gate voltage. N-channel devices fabricated with a thin layer of C60 show a room temperature on/off ratio >10(4) and current density of up to 44 mAcm(-2). Because of the ultrashort channel intrinsic to the vertical structure, the device is fully operational at a driving voltage of 200 mV. A complementary p-channel device is also investigated, and a logic inverter based on two complementary transistors is demonstrated. The vertical integration of graphene with organic semiconductors via simple, scalable, and low-temperature fabrication processes opens up new opportunities to realize flexible, transparent organic electronic, and optoelectronic devices.

High-Q nanomechanics via destructive interference of elastic waves.

Mechanical dissipation poses a ubiquitous challenge to the performance of nanomechanical devices. Here we analyze the support-induced dissipation of high-stress nanomechanical resonators. We develop a model for this loss mechanism and test it on Si(3)N(4) membranes with circular and square geometries. The measured Q values of different harmonics present a nonmonotonic behavior which is successfully explained. For azimuthal harmonics of the circular geometry we predict that destructive interference of the radiated waves leads to an exponential suppression of the clamping loss in the harmonic index. Our model can also be applied to graphene drums under high tension.

Transfer-printing of single DNA molecule arrays on graphene for high-resolution electron imaging and analysis.

Graphene represents the ultimate substrate for high-resolution transmission electron microscopy, but the deposition of biological samples on this highly hydrophobic material has until now been a challenge. We present a reliable method for depositing ordered arrays of individual elongated DNA molecules on single-layer graphene substrates for high-resolution electron beam imaging and electron energy loss spectroscopy analysis. This method is a necessary step toward the observation of single elongated DNA molecules with single base spatial resolution to directly read genetic and epigenetic information.

Stress-based resonant volatile gas microsensor operated near the critically buckled state

We describe sensing of chemical vapors from the atmosphere using critically buckled polycrystalline silicon doubly clamped mechanical resonators coated on one side with polymethyl methacrylate (PMMA). Our method of sensing is based on stress-induced resonance frequency shifts through volumetric swelling of the 60 nm thick PMMA layer resulting in altered tension in the beams. The stress change produces shifts in the resonance frequency as large as 150% of the baseline frequency. In order to maximize the sensitivity, we tailor residual stress of the polycrystalline silicon resonators to slightly exceed the critical buckling stress. We incorporate a relatively large gap between the bridge and a substrate to provide optical readout and minimize squeezed film effects. We show that the larger gap results in substantial improvements of the quality factor and frequency stability of our resonators under ambient pressure and temperature conditions compared to previous implementations. These lead to resonance freque...