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Robert Eli Tompkins

IBM

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Publication

Featured researches published by Robert Eli Tompkins.

Archive | 1991

Ceramic electrostatic chuck

Joseph Skinner Logan; Raymond Robert Ruckel; Robert Eli Tompkins; Robert Peter Westerfield

Archive | 1991

Temperature cycling ceramic electrostatic chuck

Joseph Skinner Logan; Raymond Robert Ruckel; Robert Eli Tompkins; Robert Peter Westerfield

Archive | 1993

Guard ring electrostatic chuck

Michael Scott Barnes; John Howard Keller; Joseph Skinner Logan; Robert Eli Tompkins; Robert Peter Westerfield

Archive | 1990

Electrostatic chuck having tapered electrodes

Joseph Skinner Logan; Raymond Robert Ruckel; Robert Eli Tompkins; Robert Peter Westerfield

Archive | 1995

Electrostatic chuck with reference electrode

Michael Scott Barnes; John Howard Keller; Joseph Skinner Logan; Robert Eli Tompkins; Robert Peter Westerfield

Archive | 1991

Method for fabricating a split-ring electrostatic chuck

Joseph Skinner Logan; Raymond Robert Ruckel; Robert Eli Tompkins; Robert Peter Westerfield

Archive | 1999

Electrostatic chuck and method of manufacture

Joseph Skinner Logan; Robert Eli Tompkins; John R. Miller

Archive | 1994

Electrostatic chuck having relatively thick and thin areas and means for uniformly cooling said thick and thin areas during chuck anodization

Raymond Robert Ruckel; Robert Eli Tompkins; Robert Peter Westerfield

Archive | 2002

Hybrid ceramic electrostatic clamp

Joseph Skinner Logan; John R. Miller; Mahmood Naim; Robert Eli Tompkins

Archive | 1998

Electrostatic chuck with ceramic pole protection

Joseph Skinner Logan; Robert Eli Tompkins

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Joseph Skinner Logan

IBM

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Robert Peter Westerfield

IBM

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Raymond Robert Ruckel

IBM

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John Howard Keller

IBM

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Michael Scott Barnes

IBM

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Jr. Robert Peter Westerfield

IBM

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