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Robert F. Allen

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Publication

Featured researches published by Robert F. Allen.

Archive | 1998

Methods for the in-process detection of workpieces with a monochromatic light source

Anthony L. Bartels; Robert F. Allen; Paul Holzapfel; Warren Lin

Archive | 1997

Methods and apparatus for the in-process detection and measurement of thin film layers

Paul Holzapfel; Robert F. Allen; Warren Lin; James Schlueter; Chris Karlsrud

Archive | 1996

Apparatus for the in-process detection of workpieces in a CMP environment

Robert F. Allen; Paul Holzapfel; Anthony L. Bartels; Warren Lin

Archive | 1997

Integral machine for polishing, cleaning, rinsing and drying workpieces

Jose R. Gonzalez-Martin; Chris Karlsrud; Robert F. Allen; Toby Jordan; Craig Howard; Arthur Hamer; Jeff Cunnane; Periya Gopalan; Bill Thornton; Jon MacErnie; Fernando Calderon

Archive | 1998

Combined cmp and wafer cleaning apparatus and associated methods

Jose R. Gonzalez-Martin; Chris Karlsrud; Robert F. Allen; Toby Jordan; Craig Howard; Arthur Hamer; Jeff Cunnane; Periya Gopalan; Bill Thornton; Jon MacErnie; Fernando Calderon

Archive | 1998

Methods for the in-process detection of workpieces in a CMP environment

Robert F. Allen; Paul Holzapfel; Anthony L. Bartels; Warren Lin

Archive | 1999

Automatic wafer mapping in a wet environment on a wafer cleaner

Jack F. Nimtz; Toby Jordan; Robert F. Allen

Archive | 2000

Mapping system for semiconductor wafer cassettes

Jose R. Gonzalez-Martin; Chris Karlsrud; Robert F. Allen; Toby Jordan; Craig Howard; Arthur Hamer; Jeff Cunnane; Periya Gopalan; Bill Thornton; Jon MacErnie; Fernando Calderon

Archive | 2001

METHODS AND APPARATUS FOR THE IN-PROCESS MEASUREMENT OF THIN FILM LAYERS

Paul Holzapfel; Robert F. Allen; Warren Lin

Archive | 2005

Combined chemical mechanical polishing, wafer cleaning implement, and related method

Robert F. Allen; Fernando Calderon; Jeff Cunnane; Jose R. Gonzalez-Martin; Periya Gopalan; Arthur Hamer; Craig Howard; Toby Jordan; Chris Karlsrud; Jon MacErnie; William Thornton; ヘイマー アーサー; ソーントン ウィリアム; カールスラッド クリス; エム． ハワード クレイグ; カネン ジェフ; アール． マサーニ ジョン; ジョーダン トビー; カルデロン フェルナンド; ゴパラン ペリヤ; アール． ゴンザルズ−マーティン ホセ; エフ． アレン ロバート

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