Robert J. Contolini
University of California, Berkeley
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Publication
Featured researches published by Robert J. Contolini.
Journal of The Electrochemical Society | 1994
Robert J. Contolini; Anthony F. Bernhardt; Steven T. Mayer
The authors describe an electrochemical planarization technology involving electroplating followed by electropolishing, resulting in a very flat surface containing embedded conductors. Electrochemical planarization technology has been used to produce silicon substrate multichip modules. Both the electroplating and electropolishing processes have a thickness uniformity of better than [+-] 2% ([+-]3[sigma]) across a 100 mm wafer.
Archive | 1990
Steven T. Mayer; Robert J. Contolini; Anthony F. Bernhardt
Archive | 1991
Wayne L. Bonde; Robert J. Contolini
Archive | 2001
Steven T. Mayer; Jonathan D. Reid; Robert J. Contolini
Archive | 2000
Steven T. Mayer; Richard S. Hill; Alain Harrus; Evan E. Patton; Robert J. Contolini; Steve Taatjes; Jon Reid
Archive | 1999
Steven T. Mayer; Robert J. Contolini
Archive | 1995
Robert J. Contolini; Steven T. Mayer; Lisa A. Tarte
Archive | 2002
Robert J. Contolini; Andrew J. McCutcheon; Steven T. Mayer
Archive | 1995
Anthony F. Bernhardt; Robert J. Contolini; Vincent Malba; Robert A. Riddle
Archive | 2001
Jonathan D. Reid; Steven W. Taatjes; Robert J. Contolini; Evan E. Patton