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Dive into the research topics where Robert J. Contolini is active.

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Featured researches published by Robert J. Contolini.


Journal of The Electrochemical Society | 1994

Electrochemical Planarization for Multilevel Metallization

Robert J. Contolini; Anthony F. Bernhardt; Steven T. Mayer

The authors describe an electrochemical planarization technology involving electroplating followed by electropolishing, resulting in a very flat surface containing embedded conductors. Electrochemical planarization technology has been used to produce silicon substrate multichip modules. Both the electroplating and electropolishing processes have a thickness uniformity of better than [+-] 2% ([+-]3[sigma]) across a 100 mm wafer.


Archive | 1990

Method and apparatus for spatially uniform electropolishing and electrolytic etching

Steven T. Mayer; Robert J. Contolini; Anthony F. Bernhardt


Archive | 1991

Microchannel heat sink assembly

Wayne L. Bonde; Robert J. Contolini


Archive | 2001

Method for potential controlled electroplating of fine patterns on semiconductor wafers

Steven T. Mayer; Jonathan D. Reid; Robert J. Contolini


Archive | 2000

Method and apparatus for uniform electroplating of integrated circuits using a variable field shaping element

Steven T. Mayer; Richard S. Hill; Alain Harrus; Evan E. Patton; Robert J. Contolini; Steve Taatjes; Jon Reid


Archive | 1999

Electroplanarization of large and small damascene features using diffusion barriers and electropolishing

Steven T. Mayer; Robert J. Contolini


Archive | 1995

Removal of field and embedded metal by spin spray etching

Robert J. Contolini; Steven T. Mayer; Lisa A. Tarte


Archive | 2002

Dynamically variable field shaping element

Robert J. Contolini; Andrew J. McCutcheon; Steven T. Mayer


Archive | 1995

Repairable chip bonding/interconnect process

Anthony F. Bernhardt; Robert J. Contolini; Vincent Malba; Robert A. Riddle


Archive | 2001

Electroplating process chamber and method with pre-wetting and rinsing capability

Jonathan D. Reid; Steven W. Taatjes; Robert J. Contolini; Evan E. Patton

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Steven T. Mayer

Lawrence Livermore National Laboratory

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Anthony F. Bernhardt

Lawrence Livermore National Laboratory

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Lisa A. Tarte

University of California

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Wayne L. Bonde

University of California

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