Robert J. Hanson

Subresolution silicon features and methods for forming the same

Methods of forming field effect transistors on substrates

Method of photoresist strip for plasma doping process of semiconductor manufacturing

Protective layer during lithography and etch

Protective layer for corrosion prevention during lithography and etch

Methods of forming oxides, methods of forming semiconductor constructions, and methods of forming isolation regions

Methods for removing photoresist defects and a source gas for same

Methods for removing photoresist defects and a method for processing a semiconductor device structure

Terraced film stack

Methods Of Treating Semiconductor Substrates, Methods Of Forming Openings During Semiconductor Fabrication, And Methods Of Removing Particles From Over Semiconductor Substrates