Robert J. Olsen | Researchain

Archive Network Publication Hotspot Collaboration

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Robert J. Olsen is active.

Explore More

Publication

Featured researches published by Robert J. Olsen.

Journal of Vacuum Science & Technology B | 1989

Study of aging effects in a chemical amplification resist: SAL601‐ER7

Hua‐yu Liu; Judith Seeger; Elaine Poon; Robert J. Olsen; Karen A. Graziano; Susan E. Anderson

The shelf life and film life of the electron beam resist, Microposit SAL601‐ER7 from Shipley, were studied. Solutions and films of this resist were found to exhibit a performance degradation which is a function of the storage time and temperature. Refrigeration significantly improves the stability of the resist. Component studies were used to determine that the shelf life problem is due to an interaction between the novolak resin and melamine crosslinker. Results indicate that considerable stability can be realized by using less reactive crosslinkers in the resist formulation.

Archive | 1990

Melamine-containing photoresists of improved sensitivity

Karen A. Graziano; Leonard Edward Bogan; Robert J. Olsen; Mcilnay Susan Elizabeth Anderson

Archive | 1992

Acid-hardening photoresists comprising a purified hexamethoxy methylmelamine resin as a crosslinker

Karen A. Graziano; Leonard Edward Bogan; Robert J. Olsen; Susan E. Anderson

Journal of Photopolymer Science and Technology | 1990

Some Resists Based On Chemically-Amplified Crosslinking Of Phenolic Polymers

John F. Bohland; Gary S. Calabrese; Michael F. Cronin; Diane L. Canistro; Theodore H. Fedynyshyn; Joseph J. Ferrari; Angelo A. Lamola; George W. Orsula; Edward K. Pavelchek; Roger F. Sinta; James W. Thackeray; Amanda K. Berry; Leonard E. Pogan; Mark P. de Grandpre; Wayne E. Feely; Karen A. Graziano; Robert J. Olsen; Steven Thompson; Mark R. Winkle

Archive | 1990