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Dive into the research topics where Robert W. Sparrow is active.

Publication


Featured researches published by Robert W. Sparrow.


Archive | 2000

Crystal growth and annealing method and apparatus

Steven E. Gianoulakis; Robert W. Sparrow


Archive | 2002

Photolithographic method and UV transmitting fluoride crystals with minimized spatial dispersion

Douglas C. Allan; Nicholas F. Borrelli; Charlene M. Smith; Robert W. Sparrow


Archive | 2000

Fluoride lens crystal for optical microlithography systems

Robert W. Sparrow


Archive | 2000

Making a dispersion managing crystal

Robert W. Sparrow


Archive | 2004

Coated optics to improve durability

Robert L. Maier; Paul M. Then; Robert W. Sparrow


Archive | 2002

Photolithographic element blank calcium strontium fluoride UV transmitting mixed fluoride crystal with minimized spatial dispersion

Douglas C. Allan; Nicholas F. Borrelli; Charlene M. Smith; Robert W. Sparrow


Archive | 2001

Below 160NM optical lithography crystal materials and methods of making

Robert W. Sparrow


Archive | 2002

Barium fluoride high repetition rate UV excimer laser

Robert W. Sparrow


Archive | 2002

High repetition rate excimer laser system

Michael A. Pell; Charlene M. Smith; Robert W. Sparrow; Paul M. Then


Archive | 2003

Method of making high repetition rate excimer laser crystal optics and UV

Sandra Lee Gray; Michael A. Pell; Charlene M. Smith; Robert W. Sparrow; Paul M. Then

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