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Dive into the research topics where Roberto Modica is active.

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Featured researches published by Roberto Modica.


Sensors | 2018

Sicilia—silicon carbide detectors for intense luminosity investigations and applications

S. Tudisco; Francesco La Via; C. Agodi; Carmen Altana; Giacomo Borghi; M. Boscardin; Giancarlo Bussolino; L. Calcagno; Massimo Camarda; F. Cappuzzello; D. Carbone; Salvatore Cascino; G. Casini; M. Cavallaro; Caterina Ciampi; G.A.P. Cirrone; G. Cuttone; A. Fazzi; Dario Giove; G. Gorini; L. Labate; G. Lanzalone; Grazia Litrico; Giuseppe Longo; Domenico Lo Presti; Marco Mauceri; Roberto Modica; Maurizio Moschetti; A. Muoio; F. Musumeci

Silicon carbide (SiC) is a compound semiconductor, which is considered as a possible alternative to silicon for particles and photons detection. Its characteristics make it very promising for the next generation of nuclear and particle physics experiments at high beam luminosity. Silicon Carbide detectors for Intense Luminosity Investigations and Applications (SiCILIA) is a project starting as a collaboration between the Italian National Institute of Nuclear Physics (INFN) and IMM-CNR, aiming at the realization of innovative detection systems based on SiC. In this paper, we discuss the main features of silicon carbide as a material and its potential application in the field of particles and photons detectors, the project structure and the strategies used for the prototype realization, and the first results concerning prototype production and their performance.


Materials Science Forum | 2016

Ni2Si/4H-SiC Schottky Photodiodes for Ultraviolet Light Detection

M. Mazzillo; A. Sciuto; Fabrizio Roccaforte; Corrado Bongiorno; Roberto Modica; Salvatore Marchese; Paolo Badala; Denise Calì; Francesco Patanè; B. Carbone; Alfio Russo; Salvatore Coffa

Ultraviolet (UV) monitoring is of great interest in the healthcare field to prevent excessive UV exposure risks. In the last years silicon carbide (SiC) has emerged as a suitable material for the fabrication of UV detectors. In this paper we propose a 4H-SiC Schottky photodiode with a continuous very thin Ni2Si layer operating at 0V, properly designed for UV radiation monitoring.


Microelectronics Reliability | 2007

LOCOS induced stress effects on SOI bipolar devices

S. Privitera; Roberto Modica; V. Cerantonio; G. Fallica; G. Pappalardo

The effects of thermal and intrinsic stress produced on SOI substrates by the field oxidation have been studied. Results of electrical and structural characterization obtained on SOI have been compared with standard bulk Si and a different structure has been adopted in order to reduce the induced stress.


Archive | 2003

Resistive structure integrated in a semiconductor substrate

Salvatore Leonardi; Roberto Modica


Microelectronic Engineering | 2010

Morphological and electrical characterization of SixCryCzBv thin films

S. Privitera; F. Wang; C. Niu; P. Dumont-Girard; H. Ding; K. Liu; Roberto Modica; C. Bongiorno


Archive | 2007

Vertical-type, integrated bipolar device and manufacturing process thereof

Piero Giorgio Fallica; Roberto Modica


Archive | 2003

Dielectric insulation structure for integrating electronic semiconductor devices and relevant manufacturing process

Salvatore Leonardi; Roberto Modica; Giuseppe Arena


Archive | 2000

High integration density vertical capacitor structure and fabrication process

Salvatore Leonardi; Roberto Modica


Archive | 2015

SENSOR OF VOLATILE SUBSTANCES WITH INTEGRATED HEATER AND PROCESS FOR MANUFACTURING A SENSOR OF VOLATILE SUBSTANCES

Antonello Santangelo; Salvatore Cascino; Roberto Modica; Viviana Cerantonio; Maurizio Moschetti


Archive | 2006

Process and circuit for manufacturing electronic semiconductor devices in a SOI substrate

Salvatore Leonardi; Roberto Modica

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