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Roger M. Young

IBM

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Publication

Featured researches published by Roger M. Young.

Archive | 2006

Automated tool recipe verification and correction

Timothy L. Holmes; Susan M. Cianfrani; Roger M. Young

Archive | 2005

OFFSET DETERMINATION FOR MEASUREMENT SYSTEM MATCHING

Andrew Brendler; Danielle R. Chianese; Susan M. Jankovsky; Roger M. Young

Archive | 2007

Flipping stage arrangement for reduced wafer contamination cross section and improved measurement accuracy and throughput

Shahin Zangooie; Lin Zhou; Roger M. Young; Clemente Bottini; Robert J. Foster; Ronald D. Fiege

Archive | 2013

Alignment correction system and method of use

Robert J. Foster; Lin Zhou; Shahin Zangooie; Roger M. Young; Clemente Bottini

Archive | 2008

Determining angle of incidence with respect to workpiece

Clemente Bottini; Ronald D. Fiege; Roger M. Young; Shahin Zangooie; Lin Zhou

Archive | 2007

MANUFACTURING WORK IN PROCESS MANAGEMENT SYSTEM

Jeffrey P. Gifford; Roger M. Young

Archive | 2007

Determining tool set matching using production data

Andrew Brendler; William K. Hoffman; Roger M. Young; Lin Zhou

Archive | 2007

Optical spot geometric parameter determination using calibration targets

Shahin Zangooie; Roger M. Young; Lin Zhou; Clemente Bottini; Ronald D. Fiege

Archive | 2007

Offset determination method for measurement system matching

Andrew Brendler; Danielle R. Chianese; Susan M. Jankovsky; Roger M. Young

Archive | 2008

DETERMINING SIGNAL QUALITY OF OPTICAL METROLOGY TOOL

Shahin Zangooie; Roger M. Young; Lin Zhou

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Collaboration

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Lin Zhou

IBM

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Shahin Zangooie

IBM

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Clemente Bottini

IBM

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Ronald D. Fiege

IBM

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Andrew Brendler

IBM

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Danielle R. Chianese

IBM

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Jeffrey P. Gifford

IBM

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Robert J. Foster

IBM

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Susan M. Jankovsky

IBM

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John C. Chan

IBM

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