Rolf Schulte

Photopatternable Layers from Amorphous, Diamond-Like Carbon - An Innovative Material for Microsystems Technology

A class of material, promising for micro system technology are amorphous, diamond-like carbon films deposited in low pressure plasmas. They can be produced with controllable electrical and optical properties. They exhibit outstanding mechanical properties and an excellent stability against acids, bases and organic solvents. These films can be patterned via silicon containing photoresists with a subsequent O2-RIE-etching process down to the sub-micrometer range. They are excellent barriers against moisture.