Ronny Kleinhempel
Chemnitz University of Technology
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Publication
Featured researches published by Ronny Kleinhempel.
Journal of Vacuum Science and Technology | 2006
H. Kupfer; Ronny Kleinhempel; F. Richter; C. Peters; U. Krause; T. Kopte; Y. H. Cheng
A reactive ac pulsed dual magnetron sputtering process for MgO thin-film deposition was equipped with a closed-loop control of the oxygen flow rate (FO2) using the 285nm magnesium radiation as input. Owing to this control, most of the unstable part of the partial pressure versus flowrate curve became accessible. The process worked steadily and reproducible without arcing. A dynamic deposition rate of up to 35nmm∕min could be achieved, which was higher than in the oxide mode by about a factor of 18. Both process characteristics and film properties were investigated in this work in dependence on the oxygen flow, i.e., in dependence on the particular point within the transition region where the process is operated. The films had very low extinction coefficients (<5×10−5) and refractive indices close to the bulk value. They were nearly stoichiometric with a slight oxygen surplus (Mg∕O=48∕52) which was independent of the oxygen flow. X-ray diffraction revealed a prevailing (111) orientation. Provided that appr...
Surface & Coatings Technology | 2009
F. Richter; Thomas Welzel; Ronny Kleinhempel; Thoralf Dunger; T. Knoth; M. Dimer; F. Milde
Surface & Coatings Technology | 2006
H. Kupfer; Ronny Kleinhempel; Benjamin Graffel; Th. Welzel; Th. Dunger; F. Richter; W.-M. Gnehr; T. Kopte
Plasma Processes and Polymers | 2009
Thomas Welzel; Ronny Kleinhempel; Thoralf Dunger; F. Richter
Archive | 2013
Ronny Kleinhempel; Julius Kozak; Roland Thielsch; Richard T. Wipfler; Christian Hermann Stoessel; Lee Boman
Surface & Coatings Technology | 2011
Waldemar Schönberger; Gerald Gerlach; Matthias Fahland; Peter Munzert; Ulrike Schulz; Roland Thielsch; Ronny Kleinhempel
Surface & Coatings Technology | 2011
Ronny Kleinhempel; Andre Wahl; Roland Thielsch
Plasma Processes and Polymers | 2007
Ronny Kleinhempel; Benjamin Graffel; Jan Lukaš; H. Kupfer; Thoralf Dunger; Thomas Welzel; F. Richter
Mikrochimica Acta | 2006
Ronny Kleinhempel; Gunar Kaune; M. Herrmann; H. Kupfer; W. Hoyer; F. Richter
Archive | 2012
Roland Thielsch; Ronny Kleinhempel; Andre Wahl