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Ryo Yamasaki

Tokyo Electron

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Publication

Featured researches published by Ryo Yamasaki.

Archive | 2007

Ceramic coating member for semiconductor processing apparatus

Yoshiyuki Kobayashi; Takahiro Murakami; Yoshio Harada; Junichi Takeuchi; Ryo Yamasaki; Keigo Kobayashi

Archive | 2007

Method for manufacturing ceramic covering member for semiconductor processing apparatus

Yoshio Harada; Junichi Takeuchi; Ryo Yamasaki; Keigo Kobayashi

Archive | 2006

Spray coating member having excellent heat emmision property and so on and method for producing the same

Yoshio Harada; Junichi Takeuchi; Ryo Yamasaki; Keigo Kobayashi

Archive | 2006

Structural member coated with spray coating film excellent in thermal emission properties and the like, and method for production thereof

Yoshio Harada; Junichi Takeuchi; Ryo Yamasaki; Keigo Kobayashi

Archive | 2008

Method of forming black yttrium oxide sprayed coating and member provided with black yttrium oxide sprayed coating

Yoshio Harada; Junichi Takeuchi; Ryo Yamasaki

Archive | 2011

Substrate mounting table for plasma processing apparatus and plasma processing apparatus

Ryo Yamasaki; Kaname Yasuda; Takashi Suzuki

Archive | 2008

Method for forming black-colored y2o3 thermal spray coating and black-colored y2o3 thermal spray coating member

Yoshio Harada; Junichi Takeuchi; Ryo Yamasaki

Transactions of the Japan Society of Mechanical Engineers. C | 2011

Investigation of Electrical and Mechanical Characteristics of Al2O3 Sprayed Coatings

Junichi Takeuchi; Ryo Yamasaki; Kazumi Tani; Yasuo Takahashi

Journal of High Temperature Society | 2010

Improvement of Ceramic Coatings for Electrostatic Adsorption Force Using Vacuum Plasma Spraying

Junichi Takeuchi; Ryo Yamasaki; Kazumi Tani; Yasuo Takahashi

Archive | 2009

Substrate mounting table for plasma processing apparatus, plasma processing apparatus and insulating film forming method

Takashi Suzuki; Kaname Yasuda; Ryo Yamasaki

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Collaboration

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Junichi Takeuchi

Ebara Corporation

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Yoshio Harada

Ebara Corporation

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Keigo Kobayashi

Tokyo Electron

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Kaname Yasuda

Tokyo Electron

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Takahiro Murakami

Tokyo Electron

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Takashi Suzuki

Tokyo Electron

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Yasuo Takahashi

Osaka University

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Yoshiyuki Kobayashi

Tokyo Electron

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