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Featured researches published by Ryoji Makabe.


Japanese Journal of Applied Physics | 1992

Relationship between crystal structure and chemical composition of PbTiO3 thin films prepared by sputter-assisted plasma CVD

Toshiyuki Mihara; Schoichi Mochizuki; Saburo Kimura; Ryoji Makabe

PbTiO3 thin films were prepared by sputter-assisted plasma chemical vapor deposition (CVD) on Pt-coated glass substrates at a substrate temperature of 500°C. As the source materials, a Pb metal target, TiCl4 gas and O2 gas were used. The crystal structures of the films changed from a pyrochlore phase to a perovskite one, and to a PbO (red) one with increasing Pb/Ti atomic ratio.


Japanese Journal of Applied Physics | 1971

Optical Constants of HgTe and HgSe

Akihiro Moritani; Hideki Sekiya; Kenji Taniguchi; Chihiro Hamaguchi; Junkichi Nakai; Ryoji Makabe

The optical constants of HgTe and HgSe are determined in the photon energy region 1.7~3.5 eV from ellipsometric measurements at room temperature. The structures associated with the E1 and E1+Δ1 band edges are found in the extinction coefficient spectra at energy values nearly coincident with the data of the normal incidence reflectivity for both materials. Tentative surface film corrections are made at several photon energies.


Japanese Journal of Applied Physics | 1989

Preparation of PbTiO3 Thin Films by Sputter Assisted Plasma Chemical Vapor Deposition Method

Shoichi Mochizuki; Saburo Kimura; Ryoji Makabe

Lead titanate thin films were prepared by sputter assisted plasma chemical vapor deposition method. Metallic lead as a sputtering target and titanium tetrachloride carried by hydrogen gas were used as lead and titanium sources, respectively. Without post thermal annealing, ferroelectric perovskite phase were obtained at substrate temperature of 550°C on platinum coated glass substrate with the deposition rate of about 70 nm/min. Surface of the film was smoother than the one prepared by post thermal annealing.


Japanese Journal of Applied Physics | 1996

c-Axis Oriented PbTiO 3 Thin Films on MgO and Their Microstructure

Toshiyuki Mihara; Shoichi Mochizuki; Ryoji Makabe

PbTiO 3 thin films were prepared on MgO(100) substrates using a conventional rf magnetron sputtering system with a powder target. By optimizing the deposition conditions, highly c-axis oriented PbTiO 3 epitaxial films were obtained. The c-axes of the domains in the films were normal to the substrate, but some a-axes were tilted from the normal towards (100) directions with a particular angle and fourfold symmetry. From the tilt angle and the tilt directions, it is concluded that 90° domain structures were formed by twins, the domain walls of which were (101) twin boundaries.


Shinku | 1993

Orientation of PbTiO3 Thin Films Prerared by Sputter-Assisted Plasma CVD (II)

Toshiyuki Mihara; Shoichi Mochizuki; Ryoji Makabe


Zairyo-to-kankyo | 1987

Corrosion Resistivity of TiN-Coating Steels Prepared by Plasma Assisted CVD

Tetsuo Kado; Ryoji Makabe; Shoichi Mochizuki; Sadao Nakajima; Michio Araki


Shinku | 1985

Preparation of Titanium Nitride Films by Plasma-Enhanced Chemical Vapor Deposition

Ryoji Makabe; Masaki Aoki; Shoichi Mochizuki; Saburo Kimura; Sadao Nakajima; Osamu Tabata


Archive | 1985

Method and apparatus for producing thin film by plasma chemical vapor deposition

Saburo Kimura; Ryoji Makabe; Shoichi Mochizuki; Sadao Nakajima; Osamu Tabata


真空 | 1998

Large-Area Deposition of Tin Oxide Film by Photochemical Vapour Deposition (第38回真空に関する連合講演会プロシ-ディングス(1997年11月5日〜7日,東京))

Shigeharu Tamura; Hiroyuki Magara; Tadashi Ishida; Shoichi Mochizuki; Toshiyuki Mihara; Hironori Kobayashi; Ryoji Makabe; Osamu Tabata; Toshiaki Tatsuta


Shinku | 1990

Friction and Wear Property of Titanium Nitride Film by Plasma-Enhanced Chemical Vapor Deposition

Shigeharu Tamura; Minoru Yamada; Saburo Kimura; Tadashi Ishida; Ryoji Makabe

Collaboration


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Shoichi Mochizuki

Industrial Research Institute

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Saburo Kimura

Industrial Research Institute

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Toshiyuki Mihara

Industrial Research Institute

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Sadao Nakajima

Industrial Research Institute

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Tadashi Ishida

National Institute of Advanced Industrial Science and Technology

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Michio Araki

Industrial Research Institute

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Saburo Tabata

Industrial Research Institute

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Shigeharu Tamura

Industrial Research Institute

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Tadashi Ishida

National Institute of Advanced Industrial Science and Technology

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