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Ryotaro Hayashi

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Publication

Featured researches published by Ryotaro Hayashi.

Archive | 2013

Resist composition and method for forming resist pattern

Hideo Hada; Masaru Takeshita; Ryotaro Hayashi; Syogo Matsumaru; Taku Hirayama; Hiroaki Shimizu

Archive | 2005

Polymer, positive resist composition and method for forming resist pattern

Masaru Takeshita; Hideo Hada; Ryotaro Hayashi; Takeshi Iwai; Syogo Matsumaru; Satoshi Fujimura

Archive | 2004

Resin for resist, positive resist composition, and method of forming resist pattern

Ryotaro Hayashi; Hideo Hada; Takeshi Iwai

Archive | 2004

Process for refining crude resin for electronic material

Hideo Hada; Takeshi Iwai; Masaru Takeshita; Ryotaro Hayashi; Masaaki Muroi; Kota Atsuchi; Hiroaki Tomida; Kazuyuki Shiotani

Archive | 2005

Positive Type Resist Composition, Process for Forming Resist Pattern, and Process for Performing Ion Implantation

Shinichi Kohno; Takeshi Iwai; Ryotaro Hayashi

Archive | 2007

Positive resist composition and method of forming resist pattern using same

Ryotaro Hayashi; Masaru Takeshita; Takeshi Iwai

Archive | 2003

PURIFICATION METHOD FOR CRUDE RESIN TO BE USED AS ELECTRONIC MATERIAL

Kota Atsuji; Hideo Haneda; Ryotaro Hayashi; Takeshi Iwai; Masaaki Muroi; Kazuyuki Shiotani; Masaru Takeshita; Hiroaki Tomita; 浩太 厚地; 和幸 塩谷; 雅昭 室井; 浩明 富田; 武 岩井; 亮太郎 林; 優 竹下; 英夫 羽田

Archive | 2005

Composition de réserve positive et procédé pour former un motif de réserve

Ryotaro Hayashi; Takeshi Iwai

Archive | 2005

Polymere, composition de resist positif et procede pour former un type de resist

Masaru Takeshita; Hideo Hada; Ryotaro Hayashi; Takeshi Iwai; Syogo Matsumaru; Satoshi Fujimura

Archive | 2005

Positive resist composition, method of forming resist pattern, and method of ion implantation

Shinichi Kohno; Takeshi Iwai; Ryotaro Hayashi

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Collaboration

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Takeshi Iwai

Mitsubishi

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Masaru Takeshita

Mitsubishi

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Hideo Hada

Hitachi

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Hiroaki Shimizu

Kubota

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Taku Hirayama

Tokyo Institute of Technology

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