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Ryuichi Matsuda

Mitsubishi Heavy Industries

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Archive | 2006

Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus

Hitoshi Sakamoto; Naoki Yahata; Ryuichi Matsuda; Yoshiyuki Ooba; Toshihiko Nishimori

Archive | 2001

Power supply antenna and power supply method

Ryuichi Matsuda; Noriaki Ueda; Kazuto Yoshida

Archive | 2001

Power feeding antenna and semiconductor production device

Ryuichi Matsuda; Noriaki Ueda; Kazuto Yoshida; 憲照 上田; 和人 吉田; 竜一 松田

Archive | 2003

Method and device for measuring wafer potential or temperature

Ryuichi Matsuda; Yuichi Kawano; Masahiko Inoue

Archive | 2003

Plasma processing system, plasma processing method, plasma film deposition system, and plasma film deposition method

Ryuichi Matsuda; Tadashi Shimazu; Masahiko Inoue

Archive | 2007

Barrier metal film production method

Hitoshi Sakamoto; Naoki Yahata; Ryuichi Matsuda; Yoshiyuki Ooba; Toshihiko Nishimori

Archive | 2007

Plasma processing apparatus, plasma processing method, plasma film deposition apparatus, and plasma film deposition method

Ryuichi Matsuda; Tadashi Shimazu; Masahiko Inoue

Archive | 2002

Electrostatic chuck and its manufacturing method

Kazuto Yoshida; Masahiko Inoue; Ryuichi Matsuda; Hitoshi Sakamoto

Archive | 2013

Directed-energy irradiating apparatus

Shingo Nishikata; Yuki Uchiyama; Hiroyuki Daigo; Ryuichi Matsuda; Shinya Ishii; Hiroki Uchida

Archive | 2010

GAS EXHAUST STRUCTURE, AND APPARATUS AND METHOD FOR PLASMA PROCESSING

Ryuichi Matsuda; Kazuto Yoshida

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