S. S. Pushkarev

Study of new designs for the InAlAs metamorphic buffer on GaAs substrates with distributed compensation of elastic deformations

Two new designs for a metamorphic buffer, which are modifications of the InxAl1 − xAs metamorphic buffer due to groups of layers with differing lattice parameters, are proposed and implemented. This makes it possible to affect the relaxation of the metamorphic buffer. The structural and electrical characteristics of the obtained metamorphic HEMT nanoheterostructures are also studied.

Interrelation of the construction of the metamorphic InAlAs/InGaAs nanoheterostructures with the InAs content in the active layer of 76–100% with their surface morphology and electrical properties

The influence of the construction of a metamorphic buffer on the surface morphology and electrical properties of InAlAs/InGaAs/InAlAs nanoheterostructures with InAs content in the active layer from 76 to 100% with the use of the GaAs and InP substrates is studied. It is shown that such parameters as the electron mobility and the concentration, as well as the root-mean-square surface roughness, substantially depend on the construction of the metamorphic buffer. It is established experimentally that these parameters largely depend on the maximal local gradient of the lattice constant of the metamorphic buffer in the growth direction of the layers rather than on its average value. It is shown that, with selection of the construction of the metamorphic buffer, it is possible to form nanostructured surfaces with a large-periodic profile.

Structural and photoluminescence properties of low-temperature GaAs grown on GaAs(100) and GaAs(111)A substrates

Undoped, uniformly Si-doped, and δ-Si-doped GaAs layers grown by molecular-beam epitaxy on (100)- and (111)A-oriented GaAs substrates at a temperature of 230°C are studied. The As4 pressure is varied. The surface roughness of the sample is established by atomic-force microscopy; the crystal quality, by X-ray diffraction measurements; and the energy levels of different defects, by photoluminescence spectroscopy at a temperature of 79 K. It is shown that the crystal structure is more imperfect in the case of GaAs(111)A substrates. The effect of the As4 flux during growth on the structure of low-temperature GaAs grown on different types of substrates is shown as well.

X-Ray diffractometry of metamorphic nanoheterostructures

Elastic strains in active regions of metamorphic transistor nanoheterostructures In0.7Al0.3As/In0.7Ga0.3As/In0.7Al0.3As on GaAs substrates with a metamorphic buffer (MB) having different complex designs have been determined by X-ray diffractometry. The objects of study are linear-graded MBs with different thicknesses, including those with internal strain-balanced superlattices or internal inverse steps, and a step-graded MB. All MBs are completed with an inverse step. The experimental results are compared with model predictions for hypothetical linear-graded MBs with the same average compositional gradients as for the samples under study.

Maximum drift velocity of electrons in selectively doped InAlAs/InGaAs/InAlAs heterostructures with InAs inserts

The dependence of the electron mobility and drift velocity on the growth conditions, thickness, and doping of an InAs insert placed at the center of the quantum well in a selectively doped InAlAs/InGaAs/InAlAs heterostructure has been investigated. Record enhancement of the maximum drift velocity to (2–4) × 107 cm/s in an electric field of 5 × 103 V/cm has been obtained in a 17-nm-wide quantum well with an undoped 4-nm-thick InAs insert. In the structures with additional doping of the InAs insert, which facilitates an increase in the density of electrons in the quantum well to 4.0 × 1012 cm−2, the maximum drift velocity is as high as 2 × 107 cm/s in an electric field of 7 × 103 V/cm.

Features of the diagnostics of metamorphic InAlAs/InGaAs/InAlAs nanoheterostructures by high-resolution X-ray diffraction in the ω-scanning mode

This study is devoted to the search for new possibilities of characterizing crystal-structure features using high-resolution X-ray diffraction. The emphasis is on the scanning mode across the diffraction vector (ω-scanning), since researchers usually pay little attention to this mode, and its capabilities have not yet been completely revealed. For the [011] and [01

Erratum to: “Structural and electrical properties of InAlAs/InGaAs/InAlAs HEMT heterostructures on InP substrates with InAs inserts in quantum well”

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Photoluminescence studies of In0.7Al0.3As/In0.75Ga0.25As/In0.7Al0.3As metamorphic heterostructures on GaAs substrates

] directions, the ω-peak half-width and the average tilt angle of the sample surface profile are compared. The diagnostic capabilities of X-ray scattering mapping are also studied. The objects of study are semiconductor nanoheterostructures with an InAlAs/InGaAs/InAlAs quantum well and an InxAl1–xAs metamorphic buffer grown by molecular-beam epitaxy on InP and GaAs substrates. Such nanoheterostructures are used to fabricate microwave transistors and monolithic integrated circuits. The objects under study are more completely characterized using the Hall effect, atomic-force microscopy, and low-temperature photoluminescence spectroscopy at 79 K.